Distributed Micro-Nanomachines which move with nanometer precision

以纳米精度移动的分布式微纳米机器

基本信息

  • 批准号:
    13305010
  • 负责人:
  • 金额:
    $ 34.2万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
  • 财政年份:
    2001
  • 资助国家:
    日本
  • 起止时间:
    2001 至 2003
  • 项目状态:
    已结题

项目摘要

Nanostructures have been studied to develop distributed micro-nanomachines which are integrated systems of sensors and actuators. Micromachining based on semiconductor technology has been applied for the fabrication. High density multi probe data storage systems in which recording and reading can be carried out in parallel utilizing arrayed probes. New recording principles have been developed. These are thermomechanical recording on a thin polymer film using diamond probes, electrical recording on a thin ferroelectric film using diamond probes and electrical recording on a thin conductive polymer film. In the latter recording on a conductive polymer film, increased resistance about 30 times by the phase change of the film was used for the reading. Arrayed electron field emitters with electrostatic lens was studied for the purpose of non-contact multi probe data storage systems and multi-column electron beam lithography systems for the purpose of high throughput patterning. Carbon nano tube and diamond are used as the emitter and it was proved that surface coverage of the carbon nano tube with hydrogen enhances the electron emission and reduces the noise of the emission current. Monolithic piezoelectric stage which has 6 degrees of freedom of motion was developed. This is needed not only for the multi probe data storage systems and the multi-column electron beam lithography systems but also scanning probe microscopes and so on.Distributed electrostatic actuators which have sub-micro gap face to face parallel electrodes, multi probe system of which probes can move with electrostatic micro actuator, near-field optical prove which has bow tie antenna and highly sensitive resonant sensor which is made of nanometer level thin cantilever.
纳米结构已经被研究以开发分布式微纳米机器,其是传感器和致动器的集成系统。基于半导体技术的微机械加工已被应用于制造。高密度多探针数据存储系统,其中记录和阅读可以利用阵列探针并行执行。新的记录原则已经制定。这些是使用金刚石探针在薄聚合物膜上的热机械记录,使用金刚石探针在薄铁电膜上的电记录和在薄导电聚合物膜上的电记录。在后一种在导电聚合物膜上的记录中,通过膜的相变而增加约30倍的电阻用于阅读。研究了用于非接触式多探针数据存储系统和用于高通量图形化的多列电子束光刻系统的带静电透镜的阵列电子场发射器。采用碳纳米管和金刚石作为发射体,证明了碳纳米管表面覆盖氢增强了电子发射,降低了发射电流的噪声。研制了具有6个运动自由度的单片压电工作台。这不仅是多探针数据存储系统和多列电子束光刻系统所需要的,也是扫描探针显微镜等所需要的。具有亚微米间隙的分布式静电微致动器,具有亚微米间隙的平行电极,多探针系统的探针可以随静电微致动器移动,近场光学探针具有蝴蝶结天线和高灵敏度的谐振传感器,谐振传感器由纳米级薄悬臂梁制成。

项目成果

期刊论文数量(218)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
X.Li, T.Ono, Y.Wang, M.Esashi: "Study on Ultra-Thin NEMS Cantilevers - High Yield Fabrication and Size-Effect on Young's Modulus of Silicon"Technical Digest MEMS'2002, Las Vegas. 427-430 (2002)
X.Li、T.Ono、Y.Wang、M.Esashi:“超薄 NEMS 悬臂梁的研究 - 高产量制造和硅杨氏模量的尺寸效应”Technical Digest MEMS2002,拉斯维加斯。
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    0
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X.Li, T.Abe, M.Esashi: "Endpoint Detectable Copper Through-hole Plating for the Fabrication of Glass with Electrical Feed-throughs"Pacific Rim Workshop on Transducers and Micro/Nano Technologies. 139-142 (2002)
X.Li、T.Abe、M.Esashi:“用于制造带电馈通的玻璃的端点可检测铜通孔电镀”环太平洋传感器和微/纳米技术研讨会。
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C.Chang, T.Abe, M.Esashi: "Low Stress TEOS/Ozone PECVD Oxide for Deep Trench Filling"Proceedings of the 19th Sensor Symposium. 271-274 (2002)
C.Chang、T.Abe、M.Esashi:“用于深沟槽填充的低应力 TEOS/臭氧 PECVD 氧化物”第 19 届传感器研讨会论文集。
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    0
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J.H.Bae, T.Ono, C.Konoma, M.Esashi: "Scanning Diamond Probe and Application to Thereto-mechanical Nanolithography"Proceedings MEMS'2003. 24-27 (2003)
J.H.Bae、T.Ono、C.Konoma、M.Esashi:“扫描金刚石探针及其在机械纳米光刻中的应用”会议记录 MEMS2003。
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    0
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T.Ono, X.Li, H.Miyashita, M.Esashi: "Mass Sensing of Adsorbed Molecules in Sub-picogram Sample with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・3. 1240-1243 (2003)
T.Ono、X.Li、H.Miyashita、M.Esashi:“利用超薄硅谐振器对亚皮克样品中的吸附分子进行质量传感”科学仪器评论 74・3 (2003)。
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