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The invention of interstitial-type metal nitride thin films with opto-agilent function and their device fabrication

具有光安捷功能的间隙型金属氮化物薄膜的发明及其器件制备

基本信息

批准号：
13305047
负责人：
TAKAHASHI Naoyuki
金额：
$ 31.62万
依托单位：
Shizuoka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2003
项目状态：
已结题

项目摘要

1.The invention of interstitial-type metal nitride thin films with opto-agilent function(1)Thin films of interstitial-type metal nitride were successfully prepared by original halide vapour phase growth under atmospheric pressure.(2)It was clarified, for the first time, that the thin films of interstitial-type metal nitride shows opto-agilent function.(3)By control of the nitric invasion quantity, it was found that the opto-agilent function of interstitial-type metal nitride thin films show the wavelength dependence and optical anisotropy.2.The investigation of opto-agilent function(1)The variation of refractivity, reflectivity and band-gap of interstitial-type metal nitride thin films originates from the change of the local structure in the film by the nitrogen invasion quantity. It was found the wavelength dependence of the function appears by these phenomena.(2)It was clarified by ESR and SQUIED measurement that the angle dependence of opto-agilent function derived from the magnetic anisotropy of unpaired electron in a film.3.The device fabrication of interstitial-type metal nitride thin film with opto-agilent function(1)The device fabrication of interstitial-type metal nitride thin films were successfully, such as optical switching and modulated light.From these results, the practical application as optics device and electron device in next generation may be possible using thin film of interstitial-type metal nitride with opto-agilent function.

1.具有光学灵敏功能的间隙型金属氮化物薄膜的发明(1)在常压下采用原始卤化物气相生长法制备了间隙型金属氮化物薄膜。(2)首次阐明了隙型金属氮化物薄膜具有光灵敏功能。(3)通过控制氮的侵入量，发现间隙型金属氮化薄膜的光灵敏功能表现出波长依赖性和光学各向异性。(1)间隙型金属氮化薄膜的折射率、反射率和带隙的变化源于氮的入侵量对薄膜局部结构的改变。通过这些现象发现了函数的波长依赖性。(2)通过ESR和SQUIED测量，阐明了光安捷伦函数的角度依赖关系来源于薄膜中未成对电子的磁各向异性。具有光学灵敏功能的隙型金属氮化膜器件的制备(1)成功制备了隙型金属氮化膜器件，如光开关和调制光。从这些结果来看，具有光学灵敏功能的隙型金属氮化物薄膜在下一代光学器件和电子器件中的实际应用是可能的。