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Integration of A Semiconductor Optical Modulator for Parallel Information

并行信息半导体光调制器的集成

基本信息

批准号：
13650040
负责人：
KUWAMURA Yuji
金额：
$ 1.92万
依托单位：
Kanazawa University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The parallel, optical information processing has not arrived at practical use after being able to do the plan though it is long. As for the best reason, the space light modulation panel used for the logical operation does not exist, and a transmission-type planar-illuminated optical modulator operated at alow voltage and a high speed needs to be developed. We have proposed an original planar optical modulator based on electron depletion near pin junctions which impresses the voltage from horizontal direction, and have made the element for trial purposes. A further making to high performance was researched in this research aiming though the characteristic of the extinct ratio 10dB(7.5V in the voltage) and the insertion loss 8dB and 1.2MHz at the speed had been achieved. In 2001 and 2002 years, the targets such as 1) the speed-up of operation speed, 2) the decrease of insertion-loss, 3) low power consumption and 4) making to the large-scale integration (1000 × 1000) were set, and the following results were achieved.1) Speed-up : The capacity of the element was decreased by miniaturizing the size of the element to 60μm corner level, and operation speed was able to be sped up to 120MHz.2) Insertion loss : The insertion-loss 4 dB was achieved by partially improving the element structure.3) Low electric power : Because it was a problem that the breakdown voltage for the reverse voltage in the pin junction was low, the cause was investigated. It turned out that the diffusion of the Zn atom used as p type impurities was a cause for low breakdown voltage, and designed the measures.4) Large-scale integration : The method of the electric wiring to the improvement of the microfabrication technology and the process technology and a lot of pixels etc. were examined, and the basic technology for making to the large-scale integration was developed though the integration of 1000×1000 was not able to be achieved.

并行光信息处理虽然已经规划了很久，但尚未达到实用化。就最好的理由而言，用于逻辑运算的空间光调制面板还不存在，需要开发低电压、高速操作的透射型平面照明光调制器。我们提出了一种基于pin结附近电子耗尽的原创平面光调制器，该调制器从水平方向施加电压，并已制作该元件用于试验目的。本研究旨在实现消光比10dB（电压7.5V）、高速插入损耗8dB、1.2MHz的特性，进一步向高性能化方向发展。 2001年和2002年，设定了1）运算速度的加快、2）插入损耗的降低、3）低功耗、4）大规模集成化（1000×1000）等目标，并取得了以下成果。 1）加速：通过将元件尺寸小型化至60μm角级，降低了元件容量，运算速度得以提高。加速到 120MHz。2)插入损耗：通过部分改进元件结构实现了4dB的插入损耗。3)低功率：因为pin结中反向电压的击穿电压低是一个问题，因此调查了原因。结果发现，作为p型杂质的Zn原子的扩散是造成击穿电压低的原因，并设计了对策。4)大规模集成：研究了微细加工技术和工艺技术的改进的电气布线方法和大量像素等，虽然未能实现1000×1000的集成，但开发了大规模集成的基本技术。