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Research development of a portable micro power generator based on MEMS heat engine

基于MEMS热机的便携式微型发电机的研究进展

基本信息

批准号：
14205017
负责人：
SUGIYAMA Susumu
金额：
$ 16.14万
依托单位：
Ritsumeikan University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

Hydrogen fuel combustion of MEMS two-stroke heat engine was successfully demonstrated. The MEMS heat engine can be used for a portable micro power generator with integrated micro electro magnetic generator. Volume of combustion chamber was 0.5mm^3 and theoretical engine compression ratio was 1.6. SOI bulk micromachining was used to fabricate engine components, ie., piston, cylinder, elastic spring, casing and the combustion chamber. The piston was supported by the elastic spring and the repulsion force of the spring is used to drive a reciprocal motion exerted by the combustion. The piston and the cylinder were boned by the eutectic bonding method to complete engine assembly.Hydrogen-oxygen pre-mixed fuel was used for the combustion. Pre-mixture of the fuel was controlled by precise mass flow meters. Spark ignition system of the combustion was composed of Pt-wire plugs and an external capacitor. Displacement of the piston was measured by a high-speed CMOS camera and a laser Doppler vibration-meter. Combustion pressure was measured by a piezoresistive pressure sensor integrated into the combustion rig. Experimental combustion pressure was 150kPa at stoichiometric combustion. No evidence of quenching was observed during the experiment. The displacement of the piston was 0.2mm, and this is equivalent to 20mW of power generation. The pressure-volume diagram of engine power cycle was obtained for the world-smallest combustion chamber: Thus, the micro combustion in the world-smallest chamber was successfully demonstrated, and good prospect for micro power generation system was confirmed.

成功实现了MEMS二冲程热机的氢燃料燃烧。MEMS热机可用于集成微电磁发电机的便携式微型发电机。燃烧室容积为0.5立方毫米，发动机理论压缩比为1.6。SOI体微加工用于制造发动机部件，即，活塞、气缸、弹性弹簧、壳体和燃烧室。活塞由弹性弹簧支撑，并且弹簧的排斥力用于驱动由燃烧施加的往复运动。采用共晶焊接方法将活塞与气缸连接起来，完成发动机装配，燃烧采用氢氧预混合燃料。燃料的预混合由精确的质量流量计控制。火花点火系统的燃烧是由铂丝插头和外部电容器。采用高速CMOS摄像机和激光多普勒测振仪测量活塞的位移。燃烧压力是由集成到燃烧装置中的压阻式压力传感器测量的。实验燃烧压力为150 kPa。在实验过程中没有观察到淬灭的迹象。活塞的位移为0.2mm，这相当于发电20 mW。得到了世界最小燃烧室发动机功率循环的压力-容积图，成功地演示了世界最小燃烧室的微燃烧，证实了微发电系统的良好前景。