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Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process

下一代半导体制造工艺中不可或缺的高真空对应的超洁净机器人的试制研究

基本信息

批准号：
14550218
负责人：
KANEMITSU Yoichi
金额：
$ 1.98万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

Aiming at a super clean robot applying the technology of a magnetic bearing and magnetic levitation, and realizing a perfect non-contact 3-dimensional robot, we have completed the independent examination of the perpendicular direction, the rotary actuator which manages movement of the circumference around the perpendicular axis, and the linear actuator which manages movement of a radial direction is completed by the end of fiscal 2001.In fiscal 2002,we studied on stable levitation control of the linear actuator installed on the outer rotor of the rotary actuator in rotation of the rotary actuator.Two H-infinity controllers at the center position and the maximum extension position are designed using the dynamic model as a measure against a robust unstable high order natural vibration and a gain scheduled controller is realized by changing gain ratio of two controller in proportion to a traveling distance of the actuator. The gain scheduled controller is implemented in PC by real time Li … More nux.The micro step system has been adopted as a drive system of the stepping motor of the rotary actuator, and the desired accuracy of positioning is achieved by the open loop.In fiscal 2003,the design point of the gain schedule H-infinity control of the linear actuator was selected at the center, two both end. The gain of the controller is given by the linear interpolation among the three design points and then the the high order natural vibration is decreased.In order to decrease the residual angular vibration in the rotary actuator after arrival to a target position, we try adjustment of the pulse generating timing of a stepping motor. A little improvement is achieved but residual vibration remains.In fiscal 2004,we adopted a phase compensation of the machine angle of a magnetization magnetic pole, and an electric angle of the magnetizing current detecting an angular velocity of the actuator in order to reduce immediately the free vibration after arriving at a predetermined position and to shorten positioning time. We succeeded in shortening of the time from movement of the rotatary actuator to stillness by this method. Less

以应用磁轴承和磁悬浮技术的超级清洁机器人为目标，实现完美的非接触式3维机器人，我们已于2001财年年底完成了垂直方向的独立审查，管理绕垂直轴的圆周运动的旋转致动器和管理径向运动的线性致动器。2002财年，我们完成了研究了安装在旋转执行器外转子上的线性执行器在旋转执行器旋转时的稳定悬浮控制。使用动态模型设计了中心位置和最大伸展位置的两个H无穷大控制器作为对抗鲁棒不稳定高阶固有振动的措施，并通过与执行器的行程距离成比例地改变两个控制器的增益比来实现增益调度控制器。增益调度控制器通过实时Li ... More nux在PC中实现。旋转执行器的步进电机的驱动系统采用微步系统，通过开环实现所需的定位精度。2003财年，直线执行器的增益调度H-无穷大控制的设计点选择在中心、两端。控制器的增益由三个设计点之间的线性插值给出，然后降低高阶固有振动。为了减少旋转执行器到达目标位置后的残余角振动，我们尝试调整步进电机的脉冲产生时序。虽然有所改善，但残留振动依然存在。2004年度，我们采用了磁化磁极机械角度的相位补偿，以及检测执行器角速度的磁化电流电角度，以便在到达预定位置后立即减少自由振动并缩短定位时间。通过这种方法，我们成功地缩短了旋转致动器从运动到静止的时间。较少的

项目成果

期刊论文数量（37）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Active Magnetic Bearings International Standardization

主动磁力轴承国际标准化

DOI：
发表时间：
2003
期刊：
Proc.7^<th> International symposium on magnetic suspension technology(ISMST7)
影响因子：
0
作者：
Yoichi Kanemitsu;Osami Matsushita
通讯作者：
Osami Matsushita

渡辺和英, 金光陽一, 原辰次, 芳我尚秀: "能動磁気浮上システムによる微振動制御"日本機械学会論文集C編. 68-669. 63-71 (2002)

Kazuhide Watanabe、Yoichi Kanamitsu、Tatsuji Hara、Naohide Haga：“主动磁悬浮系统的微振动控制”，日本机械工程师学会会刊，C 版 68-669（2002 年）。

DOI：
发表时间：
期刊：
影响因子：
0
作者：
通讯作者：

Identification of Unbalance and Sensor Runout on Rigid Rotor Supported by Magnetic Bearings (2^<nd> report Identification Method and Experiment by the Weighted-incremental Least Square On-line Mehtod)

磁力轴承支撑刚性转子不平衡与传感器跳动的辨识（第2次报告《加权增量最小二乘在线法辨识方法与实验》）

DOI：
发表时间：
2004
期刊：
Transaction of the Japan Society of Mechanical Engineers, Series C Vol.70, No.691
影响因子：
0
作者：
Tea-Jin PARK;Yoichi KANEMITSU;Shinya KIJIMOTO;Koichi MATSUDA
通讯作者：
Koichi MATSUDA

能動磁気浮上システムによる微振動制御

利用主动磁悬浮系统进行微振动控制