Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process

针对应用磁轴承和磁悬浮技术的超清洁机器人，实现完美的非接触式三维机器人，我们完成了垂直方向的独立检查，管理围绕垂直轴的圆周运动的旋转致动器，在2001年度结束时完成管理径向移动的线性致动器。在2002年度，本文研究了安装在旋转驱动器外转子上的直线驱动器在旋转驱动器旋转时的稳定悬浮控制问题。利用动力学模型设计了中心位置和最大伸展位置的无穷大控制器，作为对鲁棒不稳定高阶固有振动的度量，通过与致动器的行进距离成比例地改变两个控制器的增益比来实现。增益调度控制器在PC机上用真实的时间Li ...更多信息 旋转致动器的步进电机的驱动系统采用微步系统，通过开环实现所需的定位精度。在2003年财政年度，线性致动器的增益调度H ∞控制的设计点选择在中心、两个两端。控制器的增益由三个设计点之间的线性插值给出，从而降低了高阶固有振动，为了降低旋转执行器到达目标位置后的残余角振动，我们尝试调整步进电机的脉冲产生定时。2004年度，为了在到达规定位置后立即降低自由振动，缩短定位时间，采用了磁化磁极的机械角的相位补偿和检测致动器的角速度的磁化电流的电角。通过这种方法，我们成功地缩短了从运动到静止的时间。少

Aiming at a super clean robot applying the technology of a magnetic bearing and magnetic levitation, and realizing a perfect non-contact 3-dimensional robot, we have completed the independent examination of the perpendicular direction, the rotary actuator which manages movement of the circumference around the perpendicular axis, and the linear actuator which manages movement of a radial direction is completed by the end of fiscal 2001.In fiscal 2002,we studied on stable levitation control of the linear actuator installed on the outer rotor of the rotary actuator in rotation of the rotary actuator.Two H-infinity controllers at the center position and the maximum extension position are designed using the dynamic model as a measure against a robust unstable high order natural vibration and a gain scheduled controller is realized by changing gain ratio of two controller in proportion to a traveling distance of the actuator. The gain scheduled controller is implemented in PC by real time Li … More nux.The micro step system has been adopted as a drive system of the stepping motor of the rotary actuator, and the desired accuracy of positioning is achieved by the open loop.In fiscal 2003,the design point of the gain schedule H-infinity control of the linear actuator was selected at the center, two both end. The gain of the controller is given by the linear interpolation among the three design points and then the the high order natural vibration is decreased.In order to decrease the residual angular vibration in the rotary actuator after arrival to a target position, we try adjustment of the pulse generating timing of a stepping motor. A little improvement is achieved but residual vibration remains.In fiscal 2004,we adopted a phase compensation of the machine angle of a magnetization magnetic pole, and an electric angle of the magnetizing current detecting an angular velocity of the actuator in order to reduce immediately the free vibration after arriving at a predetermined position and to shorten positioning time. We succeeded in shortening of the time from movement of the rotatary actuator to stillness by this method. Less