Development of Soft X-ray Mcroscope though the Inverse Compton Scattering

本文主要研究了利用高质量电子束与高稳定Nd: YLF激光之间的逆康普顿散射产生能量范围为200-500 eV的高精密软x射线生成系统。采用专为本项目设计的激光光电阴极射频枪获得了高质量的电子束。另一方面，利用高度稳定的Nd:YLF激光系统进行了电子束的产生（利用Nd:YLF基元的4^< >次谐波）和碰撞（利用Nd:YLF基元）实验。用双缝扫描技术测量了低能电子束的束流质量。电子束发射度达到3mmmrad，这是射频加速电子的最低记录之一。激光对本振的稳定性达到0.26 ps，每脉冲激光能量约为30mJ。碰撞室的研制也取得了成功。从而实现了对低噪声软x射线的高精度测量。利用该系统，演示了碰撞点电子束尺寸的测量和产生的x射线光子与碰撞角的关系。研制了特殊设计的带片x射线聚焦系统。

The research has been concentrated on the highly sophisticated generation system of the soft X-ray with the energy range of 200-500 eV through the inverse Compton scattering between high quality electron beam and highly stabilized Nd : YLF laser light. High quality electron beam has been obtained from laser photocathode RF gun with specially designed for this project. On the other hand, highly stabilized Nd :YLF laser system is used for the generation of electron beam ( by 4^<th> harmonics of ND : YLF fundamenta1)and collision (by fundamental of Nd :YLF) experiments. The quality of electron beam has been measured by double slit scan technique for relatively low energy electron beam. The emittance of the electron beam is achieved to 3mm mrad, which is one of the lowest records for RF accelerated electron. The stability of laser light against to the local oscillator has been achieved to 0.26 ps. The energy of laser light per pulse has been obtained around 30mJ. The development of collision chamber is also successfully carried out. As the results, very precise measurements of soft X-ray with very low level noise have been realized. By using the system, the electron beam size measurements at the collision point and the dependence of collision angel for generated X-ray photons are demonstrated. The X-ray focusing system with specially designed zone plate is also developed.