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Development of Mechanical and Fatigue Testing System for Micro Elements

微元件力学与疲劳测试系统的研制

基本信息

批准号：
16360054
负责人：
MINOSHIMA Kohji
金额：
$ 9.73万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360054/
关键词：
Micro Materials Thin Film Fatigue Mechanical Properties Tensile Strength Bending Strength Size Effects Micro Elements 引張負荷曲げ負荷環境効果

项目摘要

In order to develop a reliable micro system in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not yet been established. In this investigation, mechanical testing systems for microelements under tensile and bending loads have been developed, and thereby fatigue testing at 1-200 Hz is possible. Moreover, mechanical tests were conducted for SiN thin films of 1 μm and 3 μm thick, and the effects of sample size and loading mode were investigated : the tensile strength increased with a decrease in sample size. However, the elastic modulus was independent of sample size, although it is dependent on a deposition method. Bending strength is less dependent on the sample size compared with those under tensile loading. However, the bending strength was higher than the tensile strength, indicating that the strength of a microelement is highly dependent on the loading mode. Moreover, the influence of micro artificial defect and fatigue loading on an optical fiber was investigated. The tensile strength was extremely sensitive to an environment, and the tensile strength decreased by moisture containing even in a vacuum at 10^<-5> Pa : the strength decreased with an increase in a partial pressure of water molecule and with a decrease in loading rate under both monotonic and cyclic fatigue loading. The estimation method for evaluating the life under constant and cyclic fatigue loading was proposed. The method was based upon evaluating a crack growth law, derived by tensile tests and slow strain rate tensile testing, and the life evaluated by using the proposed method agreed with experimental data.

为了在服役运行中开发可靠的微系统，必须非常重视微力学评价，即μm级微元件的力学性能，包括疲劳行为。然而，评价方法尚未建立。在这项研究中，已经开发了微元素在拉伸和弯曲载荷下的机械测试系统，从而可以在1-200 Hz下进行疲劳测试。对厚度分别为1 μm和3 μm的SiN薄膜进行了力学试验，考察了试样尺寸和加载方式对薄膜抗拉强度的影响：试样尺寸越小，拉伸强度越高。然而，弹性模量与样品大小无关，尽管它取决于沉积方法。与拉伸载荷下的试样相比，抗弯强度对试样尺寸的依赖性较小。然而，弯曲强度高于拉伸强度，表明微元件的强度高度依赖于加载方式。此外，还研究了微人为缺陷和疲劳载荷对光纤的影响。拉伸强度对环境非常敏感，即使在10^<-5> Pa的真空条件下，含湿也会导致拉伸强度下降，单调疲劳和循环疲劳载荷下，强度随水分子分压的增加和加载速率的降低而降低。提出了恒疲劳和循环疲劳载荷下的寿命估算方法。该方法基于对拉伸试验和慢应变速率拉伸试验得出的裂纹扩展规律的评价，该方法计算的寿命与实验数据吻合。