Development and evaluation of fabrication method of functional surfaces for MEMS

MEMS功能表面制造方法的开发和评估

• 批准号: 16360066
• 负责人: UMEHARA Noritsugu
• 金额: $ 9.54万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360066/
• 关键词: Functional surface; Friction; Patterning; Plasma; Ion beam; CNx; バターニング; MEMS; 低摩擦; 耐摩耗

In order to provide the new function to the contact and sliding surfaces for MEMS, it was investigated of the new fabrication method with ultra low friction, low wear rate and low bouncing height slider. The following principle results were obtained.(1) In order to provide the ultra low friction and low wear properties to the sliding surface, a new high speed coating method of Diamond-like Carbons was developed by using surface wave excited plasma. A metal pipe was coated with DLC by using a sapphire antenna. The its hardness was 21 GPa. The its deviation of the thickness was within 15% along the pipe. The temperature of the pipe was considered as the important parameter to control the structure and mechanical properties of the DLC.(2) In order to control the bouncing height of a tiny slider during sliding, a new fabrication method of micro asperities on the sliding surface was proposed. Ion-beam irradiation were used to make micro asperities because the heights of those asperities should be less than 100 nm. The Polycarbonate showed uniform asperities in several nm height. The height was controlled by the irradiation ion and plasma species and irradiation period. The effect of the micro patterns on the friction properties was investigated. A few urn height micro pattern showed that, the friction was independent of the sliding velocity.(3) In order to evaluate local surface energy on the sliding surface, the contact angle of micro condensed liquid drops were measured. By using this method, it was confirmed that the local surface energy as one metal phase in the multi-phase metal was different from the individual surface energy of each metal phase. Also it was confirmed that the cutting condition for the single crystalline Silicon changed not only surface roughness but also surface energy.

为了给MEMS的接触面和滑动面提供新的功能，研究了超低摩擦、低磨损率、低弹跳高度滑块的制造新方法。主要研究成果如下：(1)为了使滑动表面具有超低摩擦、低磨损的特性，提出了一种利用表面波激励等离子体对类金刚石材料进行高速涂层的方法。利用蓝宝石天线在金属管上涂覆类金刚石薄膜。其硬度为21 Gpa。沿管道厚度的偏差在15%以内。为了控制微小滑块在滑动过程中的弹跳高度，提出了一种新的滑动表面微凸体的制备方法。由于微凸体的高度应小于100 nm，因此采用了离子束辐照的方法来制作微凸体。聚碳酸酯在几个纳米高度上表现出均匀的凹凸不平。辐照高度受辐照离子、等离子体种类和辐照时间的控制。研究了微观形貌对摩擦性能的影响。几个缸高的微观形貌表明，摩擦力与滑动速度无关。(3)为了评估滑动面上的局部表面能，测量了微凝聚液滴的接触角。用这种方法证实了多相金属中作为一个金属相的局部表面能不同于每个金属相的单个表面能。此外，还证实了单晶硅的切割条件不仅改变了表面粗糙度，而且还改变了表面能。

项目成果

CNx膜の摩擦特性に及ぼす雰囲気ガスの影響と超低摩擦実現のための酸素濃度限界

大气气体对CNx薄膜摩擦性能的影响及实现超低摩擦的氧气浓度限制

• 发表时间: 2005
• 期刊: トライボロジスト 50・9
• 作者: 野老山貴行;中村隆;梅原徳次;冨田博嗣;竹之下雪徳
• 通讯作者: 竹之下雪徳

High-speed Deposition of Diamond-Like Carbon on the Inner Wall of Metal Pipe by Using Surface Wave-Excited Plasma

表面波激发等离子体在金属管内壁高速沉积类金刚石碳

• 发表时间: 2006
• 期刊: Journal of Institute of Applied Plasma Science Vol.14, No.12
• 作者: Sho Kishine;Hiroyuki Kousaka;Noritsugu Umehara
• 通讯作者: Noritsugu Umehara

Microwave-Excited High-Density Plasma Column Sustained Along Metal Rod at Negative Voltage

负电压下沿着金属棒维持微波激发的高密度等离子体柱

• 发表时间: 2005
• 期刊: Jpn.J.Appl.Phys., Part 2 Vol.44,No.36
• 作者: H.Kousaka;N.Umemura;K.Ono;J.Xu
• 通讯作者: J.Xu

表面波励起プラズマによる金属円筒内面への高速ダイヤモンドライクカーボン成膜

使用表面波激发等离子体在金属圆柱体的内表面上高速沉积类金刚石碳

• 发表时间: 2006
• 期刊: プラズマ応用科学 14・12
• 作者: 岸根 翔;上坂裕之;梅原徳次
• 通讯作者: 梅原徳次

The Effect of Environmental Gas on Friction Coefficient of CNx Coatings and Maximum Concentration of O2 for the Realization of Ultra-Low Friction

环境气体对CNx涂层摩擦系数的影响以及实现超低摩擦的最大O2浓度

• 发表时间: 2005
• 期刊: Journal of Japanese Society of Tribologist Vol.50, No.9
• 作者: Tokoroyama Takayuki;Takashi Nakamura;Noritsugu Umehara;Hirotsugu Tomita;Yukinori Takenoshita
• 通讯作者: Yukinori Takenoshita