Development of an optical interference micro accelerometer with automatic tuning system

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This research was carried out to develop an optical interference micro accelerometer with automatic tuning system. Major results from this project are as follows :1. Investigation of the automatic tuning system.(1), Mechanism and logic to automatically tune the sensitivity of the sensor was theoretically and experimentally investigated. Prototype system with hardware and software was made to examine its performance.2. Fabrication of the prototype(1), A prototype the automatic tuning system was fabricated using the MEMS technologies. The effect of the tunig and improvement of the performance was examined.3. Investigation on the multiplexing(1), Methods for multisensor measurement system and multiplex transmission of the optical signal was investigated and prototype system was manufactured. (2), Its performance was investigated in borehole, water and subsurface4. Summary.(1), Design methodology, MEMS process, software, optical system was summarized for future industrial production. (2), The main results from this project were submitted to appropriate international journal.