Development of an optical interference micro accelerometer with automatic tuning system

具有自动调谐系统的光学干涉微加速度计的研制

• 批准号: 16360446
• 负责人: ASANUMA Hiroshi
• 金额: $ 6.98万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360446/
• 关键词: microsensor; accelerometer; FPI; operating point; automatic tuning; MEMS

This research was carried out to develop an optical interference micro accelerometer with automatic tuning system. Major results from this project are as follows :1. Investigation of the automatic tuning system.(1), Mechanism and logic to automatically tune the sensitivity of the sensor was theoretically and experimentally investigated. Prototype system with hardware and software was made to examine its performance.2. Fabrication of the prototype(1), A prototype the automatic tuning system was fabricated using the MEMS technologies. The effect of the tunig and improvement of the performance was examined.3. Investigation on the multiplexing(1), Methods for multisensor measurement system and multiplex transmission of the optical signal was investigated and prototype system was manufactured. (2), Its performance was investigated in borehole, water and subsurface4. Summary.(1), Design methodology, MEMS process, software, optical system was summarized for future industrial production. (2), The main results from this project were submitted to appropriate international journal.

本研究旨在研制一种具有自动调谐功能的光学干涉式微加速度计。本课题的主要研究成果如下：1.自动调谐系统的研究。(1)对传感器灵敏度自动调谐的机理和逻辑进行了理论和实验研究。制作了硬件和软件原型系统，对其性能进行了测试.样机的制作（1）.利用MEMS技术制作了自动调谐系统的样机。检验了调整的效果和性能的提高.多路复用的研究（1）研究了多传感器测量系统和光信号复用传输的方法，并制作了原型系统。(2)在井下、水中和地下考察了其性能。摘要(1)从设计方法、MEMS工艺、软件、光学系统等方面进行了综述，为今后的工业化生产提供了参考。(2)该项目的主要成果已发表在相关国际期刊上。

项目成果

Development of an optical micro AE sensor with an automatic tuning system

开发具有自动调谐系统的光学微型AE传感器

• 发表时间: 2006
• 期刊: Journal of Acoustic Emission (印刷中)
• 作者: Tsutsumi;S.;Murakam;K.;Tokuda;C.;Nakayama;Y.;Yajima;D.;Toyosada;M.;H.Asanuma
• 通讯作者: H.Asanuma

Automatic tuning of an optical ultrasonic microsensor based on the Fabry-Perot interferometer

基于法布里-珀罗干涉仪的光学超声微传感器的自动调谐

• 发表时间: 2004
• 期刊: Proc 9th International Conference on Optical MEMS and Their Applications
• 作者: H.Asanuma;H.Ohishi;H.Niitsuma
• 通讯作者: H.Niitsuma