Basic research of ultra-miniature medical ultrasound transducer by hydrothermal method

水热法超微型医用超声换能器基础研究

• 批准号: 17500339
• 负责人: TAKEUCHI Shinichi
• 金额: $ 2.46万
• 依托单位: Toin University of Yokohama
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17500339/
• 关键词: hydrothermal method; PZT poly-crystalline films; Array type ultrasound probe; element factor; group factor; hydrophone; catheter; titanium wire; 水熱合成PZT多結晶膜; 合成回数; 材料特性; 比誘電率; 超小型一次元アレイプローブ; 電子セクタ走査; テーパー型のチタンワイヤ; PZT圧電多結晶膜; 超小型超音波探触子; ニー

Material properties of hydrothermally synthesized PZT poly-crystalline films were measured and relationships between number of deposition and crystal sizes, thickness of films, composition rates were investigated. Crystal size and film thickness grew up proportionally with number of deposition. PZT crystals grew up about 2 μm per one deposition and grew up about 30 μm with 15 times of deposition and film thickness increased to 50 μm. Array type ultrasound probes including 8 elements with 35 μm width, 4mm length, element pitch of 70 μm were fabricated by using hydrothermally synthesized PZT films. It could be confirmed that the probes had high distance resolution without any acoustic matching layer. It was found by measured directivity that element factor was +1-65°, group factor was about +/-10° by driving 8 elements simultaneously. The ultrasound beam could be sector scanned with phased array technique. Needle type miniature hydrophones were fabricated by deposition of PZT film on titanium wires with diameter from 0.2 to 1.0 mm and it was proved that fabricated hydrophone could be used from 1 to 20 MHz. However, peaks and dips could be observed in the frequency characteristics. The frequency of peaks and dips depend on diameter of titanium wire. The hydrophone was fabricated by using tapered titanium wire to suppress the peaks and dips in the frequency characteristics and back echo from the end of titanium wire. Furthermore, we tried to fabricate catheter type ultrasound transducer with thin titanium wire as acoustic wave guide by hydrothermal method.

测量了水热合成PZT多晶薄膜的材料性能，并研究了沉积次数与晶体尺寸、薄膜厚度、组分比之间的关系。薄膜厚度和晶粒尺寸随沉积次数的增加而增大。PZT晶体每沉积一次生长约2 μm，沉积15次生长约30 μm，膜厚增加到50 μm。利用水热合成的PZT薄膜制作了8个单元的阵列式超声探头，单元宽度为35 μm，长度为4 mm，单元间距为70 μm。可以证实，探头具有高的距离分辨率，无需任何声学匹配层。通过测量方向性发现，同时驱动8个单元时，单元因子为+1-65°，群因子为+/-10°左右。超声波束可以采用相控阵技术进行扇形扫描。采用在直径为0.2 ~ 1.0mm的钛丝上沉积PZT薄膜的方法制备了针型微型水听器，实验证明所制备的水听器可以在1 ~ 20 MHz的频率范围内使用。然而，在频率特性中可以观察到峰和谷。峰谷频率与钛丝直径有关。采用锥形钛丝制作水听器，以抑制其频率特性的峰谷和钛丝末端的回波。在此基础上，我们尝试了利用水热法制备以细钛丝为声波导的导管型超声换能器。

项目成果

Needle type miniature hydrophone with PZT poly-crystalline film deposited by hydrothermal method having wide directivity

水热法沉积PZT多晶薄膜针式微型水听器具有宽方向性

• 发表时间: 2005
• 作者: Hiroshi Kitsunai;Norimichi Kawashima;Shinichi Takeuchi;Etsuzo Ohdaira;Mutsuo Ishikawa and Minoru Kurosawa
• 通讯作者: Mutsuo Ishikawa and Minoru Kurosawa

Evaluation of small ultrasonic probe using Lead Zirconate Titanate film deposited by hydrothermal method

水热法沉积锆钛酸铅薄膜的小型超声探头评价

• 发表时间: 2007
• 期刊: Proceedings of 2007 IEEE international ultrasonics symposium.at NewYork(2007)
• 作者: Tomohito Hasegawa;Minoru K.Kurosawa;Shinichi Takeuchi
• 通讯作者: Shinichi Takeuchi

Hydrothermal polycrystalline PZT thick film transducer for high intensity ultrasound radiation at over 20 MHz

水热多晶 PZT 厚膜换能器，用于 20 MHz 以上的高强度超声辐射

• 发表时间: 2006
• 期刊: Proceedings of 2006 IEEE Ultrasonics Symposium
• 作者: Mutsuo Ishikawa;Minoru K.Kurosawa;Akito Endoh;Takeyoshi Uchida;Shinichi Takeuchi;Norimichi Kawashima
• 通讯作者: Norimichi Kawashima

水熱合成PZT多結晶膜を用いた超広帯域超音波トランスデューサ-成膜条件の最適化へ向けて-

使用水热合成PZT多晶薄膜的超宽带超声波换能器 - 成膜条件的优化 -

• 发表时间: 2005
• 期刊: 電子情報通信学会技術研究報告 US2005-30
• 作者: 石河 睦生;黒澤 実;長谷川 智仁;遠藤 聡人;竹内 真一
• 通讯作者: 竹内 真一

Development of miniature hydrophone with hydro-thermally synthesized PZT poly- crystalline film

水热合成PZT多晶薄膜微型水听器的研制

• 发表时间: 2005
• 期刊: Papers of twelfth international congress on sound and vibration Paper 150(CD-ROM)
• 作者: Shinichi Takeuchi;Hiroshi Kitsunai;Takahiro Suzuki;Mutsuo Ishikawa;Norimichi Kawashima;Etsuzo Ohadaira;Shinichi Takeuchi
• 通讯作者: Shinichi Takeuchi