Fabrication of the High conductive diamond like carbon films and development of the novel nano-structumd electrochemical devioas

本研究尝试采用杂质（氮原子）掺杂的方法提高类金刚石碳膜的导电性，制备高导电性、可极化的电极材料，并尝试开发将纳米结构的特殊性与导电DLC膜优越的电化学性能相结合的新型电化学器件。(1)建立高导电性DLC薄膜的沉积方法及其电化学性能。通过在等离子体CVD法合成的DLC薄膜中加入氮原子，成功制备了重氮掺杂DLC薄膜。在CVD合成过程中，可以通过改变射频等离子体功率来控制DLC薄膜的电阻率。所得的高导电性DLC薄膜在0.1 M H_2SO_4中具有较宽的工作电位范围（约4.0 V），与掺硼金刚石电极的工作电位范围（约3.5 V）相同。因此，高导电性的DLC薄膜是一种理想的极化电极材料，对Fe(CN)_6^<〓>等典型氧化还原物质具有良好的电化学响应。此外，在强酸溶液（0.1M NaF in 1M HNO_3）中电化学处理（长期电位循环从-0.65 V到1.3 V），高导电性DLC膜具有很高的耐腐蚀性，表明DLC膜在极端环境条件下的电化学应用具有很高的稳定性。(2)导电DLC通孔膜的制备及开关离子渗透过滤器的研制通过在具有高度有序纳米孔合金的多孔氧化铝表面沉积厚度为5纳米的DLC膜，制备了导电DLC通孔膜。采用孔径为25 nm的导电纳米多孔膜作为过滤材料，在导电DLC膜上施加正电位抑制阳离子的渗透性，施加负电位抑制阴离子的渗透性。对于正阴离子混合介质，可以通过施加负电位来实现阳离子的选择性渗透，从而成功地实现了根据孔径大小和膜电位任意控制离子渗透的开关过滤器。少

In this study, highly conductive and polarizable electrode material was tried to be fabricated by improving the conductivity of diamond like carbon films using the impurity (nitrogen atoms) doping methods and the novel electrochemical device that combines the specificity of the nano-structure and the superior electrochemical properties of conductive DLC films was tried to be developed.(1) Establishment of the deposition methods of highly conductive DLC films and its electrochemical properties. The heavily nitrogen doped DLC films was successfully fabricated by adding nitrogen atoms in the DLC thin films that was synthesized using plasma CVD methods. The resistivity of DLC films could be controlled by changing the RF plasma power during the CVD synthesis. The resulting highly conductive DLC films show the wide working potential range (ca. 4.0 V) in 0.1 M H_2SO_4, that is in the same range with that fir the boron-doped diamond electrodes (ca. 3.5 V). Therefore, it turned out that highly … More conductive DLC films works as an ideal polarizable electrode material with good response fix electrochemical reaction of typical redox species like Fe(CN)_6^<〓>. Moreover, the highly conductive DLC films show high corrosion resistance for the electrochemical treatment (long term potential cycling from -0.65 to 1.3 V) in strong acid solution (0.1M NaF in 1M HNO_3, indicating that the DLC films was highly stable fir the electrochemical application in extreme environmental conditions.(2) Fabrication of the conductive DLC thorough-hole membrane and the development of the switching ion permeation filtersConductive DLC thorough-hole membrane was fabricated by depositing DLC films with thickness of by nano meters on the surface of porous alumina with highly ordered nano-pore allays. By using the conductive nano-porous membrane with 25 nm of pore diameter as a filter material, the permeability of cation was suppressed by applying positive potential on conductive DLC membrane and the permeability of anion was suppressed by applying negative potential. For the mixed media of cation and anion, the selective permeability for cation could be achieved by applying negative potential Therefore the switching filters that can arbitrarily control the ion permeability by the size of pore diameters and the membrane potential could be successfully realized. Less