Fabrication of the High conductive diamond like carbon films and development of the novel nano-structumd electrochemical devioas

本研究试图通过掺杂杂质(氮原子)的方法来提高类金刚石薄膜的导电性，从而制备出高导电性和可极化的电极材料，并试图开发出结合类金刚石薄膜纳米结构的特殊性和导电类金刚石薄膜优异的电化学性能的新型电化学器件。(1)高导电性类金刚石薄膜的制备方法及其电化学性能的建立。通过在等离子体CVD法制备的类金刚石薄膜中添加氮原子，成功地制备了重氮掺杂类金刚石薄膜。在CVD合成过程中，可以通过改变射频等离子体功率来控制DLC薄膜的电阻率。在0.1MH_2SO_4中，高导电性DLC膜表现出较宽的工作电势范围(约4.0V)，与掺硼金刚石电极的工作电势范围(约3.5V)相同。因此，事实证明，高度…导电性较好的类金刚石膜是一种理想的极化电极材料，对典型的氧化还原物种如Fe(CN)6^&lt；〓&gt；具有良好的电化学反应响应。此外，在强酸性溶液(0.1MNaF在1MHNO_3中)中，高导电性的DLC膜对电化学处理(长期电位循环为-0.65~1.3V)表现出很高的耐腐蚀性，表明DLC膜在极端环境条件下的电化学应用具有很高的稳定性。(2)导电类金刚石全孔膜的制备及开关离子渗透滤膜的研制以孔径为25 nm的导电纳米多孔膜为过滤材料，通过在导电类金刚石膜上施加正电位来抑制阳离子的通透性，通过施加负电位来抑制阴离子的通透性。对于阳离子和阴离子混合介质，可以通过施加负电位来实现对阳离子的选择性渗透，从而成功地实现了可以通过孔径和膜电位的大小来任意控制离子渗透率的开关过滤器。较少

In this study, highly conductive and polarizable electrode material was tried to be fabricated by improving the conductivity of diamond like carbon films using the impurity (nitrogen atoms) doping methods and the novel electrochemical device that combines the specificity of the nano-structure and the superior electrochemical properties of conductive DLC films was tried to be developed.(1) Establishment of the deposition methods of highly conductive DLC films and its electrochemical properties. The heavily nitrogen doped DLC films was successfully fabricated by adding nitrogen atoms in the DLC thin films that was synthesized using plasma CVD methods. The resistivity of DLC films could be controlled by changing the RF plasma power during the CVD synthesis. The resulting highly conductive DLC films show the wide working potential range (ca. 4.0 V) in 0.1 M H_2SO_4, that is in the same range with that fir the boron-doped diamond electrodes (ca. 3.5 V). Therefore, it turned out that highly … More conductive DLC films works as an ideal polarizable electrode material with good response fix electrochemical reaction of typical redox species like Fe(CN)_6^<〓>. Moreover, the highly conductive DLC films show high corrosion resistance for the electrochemical treatment (long term potential cycling from -0.65 to 1.3 V) in strong acid solution (0.1M NaF in 1M HNO_3, indicating that the DLC films was highly stable fir the electrochemical application in extreme environmental conditions.(2) Fabrication of the conductive DLC thorough-hole membrane and the development of the switching ion permeation filtersConductive DLC thorough-hole membrane was fabricated by depositing DLC films with thickness of by nano meters on the surface of porous alumina with highly ordered nano-pore allays. By using the conductive nano-porous membrane with 25 nm of pore diameter as a filter material, the permeability of cation was suppressed by applying positive potential on conductive DLC membrane and the permeability of anion was suppressed by applying negative potential. For the mixed media of cation and anion, the selective permeability for cation could be achieved by applying negative potential Therefore the switching filters that can arbitrarily control the ion permeability by the size of pore diameters and the membrane potential could be successfully realized. Less