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Study on interaction between molecules adsorbed on silicon surface using quartz crystal microbalance and the multi-component organic species adsorption-induced contamination model

利用石英晶体微天平和多组分有机物吸附污染模型研究硅表面吸附分子之间的相互作用

基本信息

批准号：
18560730
负责人：
HABUKA Hitoshi
金额：
$ 1.96万
依托单位：
Yokohama National University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560730/
关键词：
Quartz crystal microbalance Organic molecule Physisorption Desorption Rate constant Molecular interaction

项目摘要

A method and a process are studied for evaluating an interaction between organic molecules which are physisorbed on silicon surface. For this purpose, the quartz crystal microbalance (QCM) is used; the data obtained by the QCM is analyzed linked with the rate theory (The Multi-component Organic Species Adsorption-Induced Contamination (MOSAIC) model).In this study, the following processes are employed.(a) Water, isopropanol (IPA) and diethyl phthalate (DEP) are supplied to silicon surface of the QCM in the form of vapor diluted with gas nitrogen.(b) In each single-component system of IPA and DEP, the rate constants of physisorption and desorption are obtained in nitrogen ambient having humidity, from the behavior of increase and decrease in its concentration on silicon surface.(c) Next, the mixture of IPA vapor and DEP vapor is supplied to the silicon surface in nitrogen ambient having humidity.(d) In this multi-component system, the increase and decrease behavior is calculated on the … More basis of the MOSAIC model using the rate constants obtained from each single-component system.Because the calculation agreed with the measurement, the following conclusions are stated.(1) The adsorption and desorption behavior in a two-component system can be described using the rate constants obtained in each single-component system.(2) The larger limit of the surface concentration of physisorbed organic compounds is functions of rate constants and concentration of the organic compounds existing in the gas phase.(3) The area occupied by organic molecule is obtained by the measurement. The area for DEP is 2 times larger than that for IPA. This relationship is acceptable on the basis of the estimation accounting for bond length between C, H and 0 atoms.(4) The area occupied in the two component system (IPA and DEP) is explained using the area for IPA and DEP in a single-component system. This indicates that there is not a significant interaction between IPA and DEP molecules.From these, the measurement using the QCM method can provide with the information of a relative value of an area occupied by an organic molecule and an interaction between organic molecules. Less

研究了一种用于评估物理吸附在硅表面上的有机分子之间的相互作用的方法和过程。为此，使用石英晶体微天平（QCM），由QCM获得的数据进行分析与速率理论（多组分有机物种吸附诱导污染（MOSAIC）模型）。(a)水、异丙醇（IPA）和邻苯二甲酸二乙酯（DEP）以用氮气稀释的蒸汽形式供应到QCM的硅表面。(b)在IPA和DEP各单组分体系中，根据其在硅表面浓度的增减行为，得到了在有湿度的氮气环境中的物理吸附和解吸速率常数。(c)接着，在具有湿度的氮气环境中，将IPA蒸汽和DEP蒸汽的混合物供应到硅表面。(d)在该多组分系统中，增加和减少行为在 ...更多信息在MOSAIC模型的基础上，利用各单组分体系的反应速率常数进行了计算，由于计算结果与实测结果相吻合，得出以下结论。(1)双组分体系中的吸附和解吸行为可以用在每个单组分体系中获得的速率常数来描述。(2)物理吸附的有机化合物的表面浓度的较大极限是速率常数和存在于气相中的有机化合物的浓度的函数。(3)通过测量得到有机分子所占的面积。DEP的面积是IPA的2倍。基于C、H和O原子之间的键长的估计，该关系是可接受的。(4)使用单组分体系中IPA和DEP的面积来解释双组分体系（IPA和DEP）中所占的面积。这表明IPA和DEP分子之间不存在显著的相互作用，由此，使用QCM方法的测量可以提供有机分子所占面积的相对值和有机分子之间的相互作用的信息。少