Development of ultra micro cascade wind tunnel and its application to aerodynamic performance design for components of MEMS turbomachinery

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MEMS turbine cascade was designed and fabricated, in order to establish the cascade aerothermodynamics design method for MEMS turbomachinery, and clarify the mechanical behavior of compressible cascade blade-to-blade flow field in low Reynolds number regime. Stagnation pressure loss coefficient, blade Mach number, and the Zweifel parameter for the MEMS turbine cascade were determined. It is concluded that the stagnation pressure loss coefficient of the MEMS turbine cascade is several order larger than that of large counterpart. Therefore, significant penalty must be paid for the aerothermodynamic design of the MEMS turbomachinery.