Development of Sequential Self-Assembly Technique for MEMS

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A development of a sequential self-assembly (SSA) technique to assemble functional components on a micro electro mechanical systems (MEMS) by self-assembly with controlling the assembly order was carried out. Feasibility study of several different approaches such as a contact potential difference, optically induced dielectrophoresis, template assisted self-assembly, and DNA mediated self-assembly were performed. Furthermore, a new modeling method of self-assembly for the component size from millimeter to micrometer scale was proposed and its validity was confirmed experimentally. Consequently, DNA mediated SSA technique under controlled ambient temperature was proved to be the most promising approach.