Evaluation of interface delamination strength on the electronic device by stress measurement
Evaluation of interface delamination strength on the electronic device by stress measurement
批准号:
19760488
负责人:
HASEGAWA Makoto
金额:
$2.23万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Young Scientists (B)
财政年份:
2007
资助国家:
日本
项目状态:
已结题
起止时间:
2007 至 2008
中文摘要
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英文摘要
電子デバイスなどでは、内部および外部からの力学的負荷による界面の剥離が問題となっている。本研究では、電子デバイスを模擬した材料としてCuと単結晶Al2O3あるいは多結晶Al2O3 の接合体を作製し、力学的負荷を接合体に加えた時に剥離に影響を与える界面に平行および垂直な方向の応力成分を求めた。応力成分はEBSD法を用いて得られるAl2O3の結晶方位の情報とレーザーを用いた蛍光分光法により得られるピークの位置情報より算出することができた。また、界面が剥離している状態においても応力成分を求めることができた。
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