Dual-axis micro friction force miscroscopy pobe for dynamic measurements

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Friction force microscopy, a type of scanning probe microscopy, is a core method for measuring micro/nanotribological phenomena. In this study, we succeeded in developing a probe with an electrostatic actuator, which can provide the dynamic measurement and probe position control. In this probe, the lateral and vertical forces are measured without interfering with each other, by detecting the lateral and vertical forces with the double-cantilever and torsion beams, respectively. The electrode part that faces the double-cantilever beam was successfully fabricated by using micromachining techniques, which can provide an electrostatic actuator that drives the probe laterally.