Development of novel processes by using supercritical RF plasmas

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After the plasma was generated by introducing RF waves of CO_2 at atmospheric pressure, CO_2 was pumped into the reaction cell and the pressure was increased to the target pressure. Then, the RF plasmas were maintained under high pressure conditions and supercritical conditions. From the spectroscopic measurements, temperatures of the plasmas were estimated. Although we attempted to estimate electron densities, it was difficult at present. Furthermore, we generated various nanomaterials by using the plasmas.