Investigation on development of advanced frequency shift probe

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This paper reports plane-type frequency shift probe for electron density measurements in reactive processing plasmas. The sheath effects were investigated by electromagnetic field analysis with FDTD simulation, and the calculated characteristics were confirmed experimentally. The FDTD simulation revealed that the sheath formed around the probe leads to underestimation of electron density, in comparison to the real density given as an initial condition in the simulation. However, an increase in a slit width of the probe antenna suppressed the density underestimation, and effective for improvement of accuracy of the density measurement. Furthermore, combination of two probes with different slit width enabled measurements of not only electron density and electron temperature by considering the sheath effects.