Study on the suppression mechanism of crystal defects by the doping of the impurities in the melt during the crystal growth

晶体生长过程中熔体中杂质的掺杂抑制晶体缺陷的机理研究

• 批准号: 20550173
• 负责人: WATAUCHI Satoshi
• 金额: $ 3.16万
• 依托单位: University of Yamanashi
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20550173/
• 关键词: 結晶・多結晶材料; ルチル単結晶; 界面形状; エッチピット密度; 酸化チタン(ルチル); 単結晶; 浮遊帯域溶融法; 不純物効果; 結晶欠陥; 欠陥評価; エッチピット; 固液界面形状; 光透過率

I started this project to clarify the mechanism of the unique impurity doping effects on the crystal growth of rutile. Following results were clarified by the careful characterization of the crystal defects. The impurity elements doped in the melts were detected in the grown crystals at the level of ppm. The etch pit density (EPD) was high at the periphery of the grown crystal and low at the center. The order of EPD was reduced by the impurity doping from ～10^5/cm^2 to ～10^4/cm^2. The EPD was also significantly affected by the solid-liquid interface shape during the crystal growth.

我开始这个项目，以澄清独特的杂质掺杂对金红石晶体生长的影响机制。通过对晶体缺陷的仔细表征，澄清了以下结果。熔体中掺杂的杂质元素在生长的晶体中检测到ppm的水平。腐蚀坑密度（EPD）在生长的晶体的外围高，在中心低。通过杂质掺杂，EPD的阶数从约10^5/cm ^2降低到约10^4/cm ^2。晶体生长过程中固液界面形状对EPD也有显著影响。

项目成果

Isao Tanaka “Effects of tilting mirrors on the solid-liquid interface during floating zone growth using tilting-mirror-type infrared-heating image furnace"

Isao Tanaka“使用倾斜镜式红外加热图像炉进行浮区生长期间倾斜镜对固液界面的影响”

• 发表时间: 2010
• 期刊: Journal of Crystal Growth Vol.312, Issues 12-13
• 作者: Md.Abdur Razzaque Sarker;Satoshi Watauchi;Masanori Nagao;Takashi Watanabe;Isamu Shindo
• 通讯作者: Isamu Shindo

傾斜鏡型赤外綿加熱浮遊帯域溶融法による結晶育成おけるFeedサイズ効果

倾斜镜面红外棉加热浮区熔化法进料尺寸对晶体生长的影响

• 发表时间: 2009
• 作者: 綿打敏司;他5名
• 通讯作者: 他5名

Effects of the focusing on growth of rutile crystals byinclined focusing floating zone (IFFZ) method

倾斜聚焦浮区法(IFFZ)聚焦对金红石晶体生长的影响

• 发表时间: 2008
• 作者: Md. Abdur Razzaaue Sarker;Takashi Watanabe;Satoshi Watauchi;Masanori Nagao;Isao Tanaka
• 通讯作者: Isao Tanaka

Solid-liquid interface in floating zone growth of rutile crystal with variation of focusing angle

聚焦角变化下金红石晶体浮区生长的固液界面

• 发表时间: 2008
• 作者: Md. Abdur Razzague Sarker;Satoshi Watauchi;Isao Tanaka
• 通讯作者: Isao Tanaka

Tilting effects of mirrors during crystal growth by infrared heating floating zone method

红外加热浮区法晶体生长过程中镜子倾斜效应

• 发表时间: 2010
• 作者: S. Kumamoto;M. Watanabe;N. Kawakami. M;Nakamura;K. Yamana;S.Watauchi
• 通讯作者: S.Watauchi