Study on the suppression mechanism of crystal defects by the doping of the impurities in the melt during the crystal growth

晶体生长过程中熔体中杂质的掺杂抑制晶体缺陷的机理研究

• 批准号: 20550173
• 负责人: WATAUCHI Satoshi
• 金额: $ 3.16万
• 依托单位: University of Yamanashi
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20550173/
• 关键词: 結晶・多結晶材料; ルチル単結晶; 界面形状; エッチピット密度; 酸化チタン(ルチル); 単結晶; 浮遊帯域溶融法; 不純物効果; 結晶欠陥; 欠陥評価; エッチピット; 固液界面形状; 光透過率

I started this project to clarify the mechanism of the unique impurity doping effects on the crystal growth of rutile. Following results were clarified by the careful characterization of the crystal defects. The impurity elements doped in the melts were detected in the grown crystals at the level of ppm. The etch pit density (EPD) was high at the periphery of the grown crystal and low at the center. The order of EPD was reduced by the impurity doping from ～10^5/cm^2 to ～10^4/cm^2. The EPD was also significantly affected by the solid-liquid interface shape during the crystal growth.

我启动了这个项目，以阐明独特的杂质掺杂作用对金红石晶体生长的机制。通过仔细表征晶体缺陷的表征来阐明以下结果。在PPM水平的生长晶体中检测到掺杂熔体中的杂质元件。蚀刻坑密度（EPD）在生长晶体的周围较高，中心较低。通过杂质掺杂从〜10^5/cm^2到〜10^4/cm^2的杂质减少了EPD的顺序。在晶体生长过程中，EPD还受固液界面形状的显着影响。

项目成果

Isao Tanaka “Effects of tilting mirrors on the solid-liquid interface during floating zone growth using tilting-mirror-type infrared-heating image furnace"

Isao Tanaka“使用倾斜镜式红外加热图像炉进行浮区生长期间倾斜镜对固液界面的影响”

• 发表时间: 2010
• 期刊: Journal of Crystal Growth Vol.312, Issues 12-13
• 作者: Md.Abdur Razzaque Sarker;Satoshi Watauchi;Masanori Nagao;Takashi Watanabe;Isamu Shindo
• 通讯作者: Isamu Shindo

傾斜鏡型赤外綿加熱浮遊帯域溶融法による結晶育成おけるFeedサイズ効果

倾斜镜面红外棉加热浮区熔化法进料尺寸对晶体生长的影响

• 发表时间: 2009
• 作者: 綿打敏司;他5名
• 通讯作者: 他5名

Solid-liquid interface in floating zone growth of rutile crystal with variation of focusing angle

聚焦角变化下金红石晶体浮区生长的固液界面

• 发表时间: 2008
• 作者: Md. Abdur Razzague Sarker;Satoshi Watauchi;Isao Tanaka
• 通讯作者: Isao Tanaka

Effects of the focusing on growth of rutile crystals byinclined focusing floating zone (IFFZ) method

倾斜聚焦浮区法(IFFZ)聚焦对金红石晶体生长的影响

• 发表时间: 2008
• 作者: Md. Abdur Razzaaue Sarker;Takashi Watanabe;Satoshi Watauchi;Masanori Nagao;Isao Tanaka
• 通讯作者: Isao Tanaka

Y添加溶媒を用いたルチル単結晶のTSFZ育成とその結晶欠陥評価

添加Y溶剂的金红石单晶TSFZ生长及其晶体缺陷评价

• 发表时间: 2008
• 作者: 深沢真司;長尾雅則;綿打敏司;田中功
• 通讯作者: 田中功