Surface acoustic wave substrate structure without bulk wave radiation free using reverse proton exchange and its application to low-loss and wide-band filter

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For the development of high-performance surface acoustic wave (SAW) devices, the materials, substrate structures, and SAW modes required to realize high coupling, high stability, low loss, and high frequency have been widely demanded. In this study, it has been found theoretically and experimentally that, by adapting the substrate structure with a reverse-proton-exchanged layer and a buried proton-exchanged layer to a shear-horizontal-type leaky SAW and a longitudinal-type leaky SAW on LiNbO_3, the propagation and resonance properties can be considerably improved.