Development of laser-machinable glass by electric-field assisted ion-exchange

为了改善硼硅酸盐玻璃的激光加工性，采用电场辅助固相离子交换法在硼硅酸盐玻璃表面掺杂铜、银离子。结果发现，在紫外区，掺铜和掺银玻璃具有不同的光学特性和激光加工性。用三倍频和四倍频的三倍频和四倍频激光分别对铜区和银区进行激光辐照，获得了平坦、光滑和无缺陷的空穴，因为它们具有较高的光吸收。然后进行了铜和银在玻璃中的顺序掺杂。虽然预期会形成分离的两层，即含铜和含银区域，但EPMA结果表明，表面改性层同时含有铜和银。

In order to improve the laser-machinability of borosilicate glass, copper and silver ions were doped to the borosilicate glass surface by electric field-assisted solid-state ion-exchange method. As a result, it was found that copper-doped and silver-doped glasses had different optical characteristics and laser-machinabilities in UV range. Third and fourth harmonic generation (THG/FHG) of Nd:YAG nanosecond laser irradiations to copper-containing region and FHG to silver-containing region produced flat, smooth and defect-free holes because of their high optical absorptions. Then the sequential doping of copper and silver to glass was carried out. Although the formation of separated two layers, that is, copper-containing and silver-containing regions, was expected, the EPMA results showed that the surface modified layer contained both of copper and silver.