High wear resistance and micro structures of ceramic coatings fabricated by novel thermal plasma CVD method

采用热等离子体化学气相沉积方法在WC-Co刀具表面沉积了部分稳定的氧化锆/氮化钛(TiN/PSZ)双层陶瓷涂层，研究了涂层的耐磨性与组织结构的关系。利用水蒸气成功地镀制了TiN/PSZ双层膜，并将其引入CVD设备中。随着水分的逐步增加(阶梯法)，TiN/PSZ双层涂层样品表现出较好的耐电弧性。横截面显微组织观察表明，提高PSZ与TiN层之间的粘附性比在涂层上致密PSZ能有效地提高涂层的耐磨性。

To elucidate the relationships between wear resistance and microstructure of double layered ceramic coatings consisted of the partially stabilized zirconia/titanium nitride(TiN/PSZ) deposited on WC-Co cutting tools by thermal plasma CVD method, this research was carried out. TiN/PSZ double layer was successfully coated by using water vapor, which is introduced to the CVD equipment. When the amount of water was increased stepwise(step method), TiN/PSZ doubly coated sample showed a good were resistance. The cross sectional microstructure observations showed that the increasing an adherence between PSZ and TiN layers effectively increased the ware resistance than by densifing the PSZ over coated layer.