Development of Mechanical Property Evaluation Method for Micro 3D-structure Using Digital Holography

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The ability to apply a time-averaged digital holography to defect detection with applying vibrating was shown. We proposed a calibration method to measure the displacement and strain distributions using a number of imaging devices. The availability was confirmed with an experimental verification. A structure design of the compact displacement and strain distribution measurement system with a number of imaging devices was performed. A prototype of an imaging head with four imaging devices specialized for the digital holography was built.