High precision multilayer-planar motor without permanent magnets characterized by high thrust to mover mass ratio, easy-fabrication and easy-disassembly

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For high precision multilayer planar motors which have high thrust-to-mover mass ratio without permanent magnets, suitable actuator structures and planar configuration with the actuators have been studied. In the study, two actuator structures were proposed and their characteristics were examined analytically and experimentally. The results show that one of the actuator structures provides the high thrust-to-mover mass ratio and the other is very simple and useful for a wide application range.