Design and High Precision Control of an Ultra-high Speed and Large Thrust Next Generation Linear Motion Mechanism

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Linear motion mechanisms are often used for industrial machines. Their acceleration and velocity characteristics directly influence the production efficiency of the machines. The purpose of this research is to design and realize an ultrahigh speed linear motion mechanism that can move at the acceleration higher than 980m/s^2 (100G) and at the velocity higher than 20m/s. For this purpose, the following results have accomplished in this research subject ;(1) An improved movable table of the linear motion mechanism was designed and made experimentally. The experimental linear motion mechanism could move at the acceleration higher than 991m/s^2 (101G) and at the velocity higher than 12m/s.(2) The simulated results show that the linear motion system composed of the improved experimental mechanism and a driving unit of which output electric power is higher than that in the conventional system can move at 20m/s.(3) PTP positioning system for the linear motion mechanism was designed and its positioning performance was evaluated. In the system, a PID compensator including a suitable nonlinear integrator and a phase adjuster are used. Experimental 300mm step responses show that the positioning time and the positioning accuracy were approximate 0.1s and 0.5 micrometers, respectively.(4) The temperature characteristic of the movable table under longtime step motion was measured experimentally. The experimental rise in the temperature was approximate 2 degrees C.(5) The practical control method proposed by the head investigator of this research subject was improved for higher positioning performance. The robust performance was evaluated by simulation.