Development of ZnO thermoelectric thin film with fine particle using plasma sputtering and plasma flow

为了实现高性能的热电薄膜材料，研究了放电等离子烧结过程中烧结试件内部结构控制的机理，并利用等离子体溅射和等离子流控技术研制了具有细小颗粒的氧化锌热电薄膜。

For the realization of the high-performance thermoelectric thin film materials, the study of mechanism of the internal construction control in sintered specimen on Spark Plasma Sintering process and development of ZnO thermoelectric thin film with fine particle using plasma sputtering and plasma flow were carried out.