Quantitative analysis of SEM image contrasts with consideration of diffraction phenomenon and challenges of nano-characterization

在本研究计划中，电子沟道（EC）对比的形成机制进行了研究，在SEM-BSE（背散射电子）图像中的EC对比的影响，样品的倾斜和电子探测器的位置。实验结果表明，晶体样品中初级电子波的强度分布与原子柱位置的相对关系解释了EC反差。提出了一种表征位错的新方法。

In this research project, the formation mechanism of electron channeling(EC) contrasts in SEM-BSE(back-scatter electron) images was investigated by examining the influences of EC contrasts to the tilting of specimen and the position of an electron detector. The experimental results revealed that the EC contrasts are explained by the relative relationship between the intensity distribution of primary electron waves and the positions of atomic columns in crystalline specimen. A new procedure for characterization of dislocations was proposed.