Spectroscopic Imaging Ellipsometry for Opto-VLSI Engineering and Nanotechnology Applications

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The focus for implementation of spectroscopic imaging ellipsometry is to create a powerful optical analysis and characterisation tool to complement the advanced integrated circuit test facilities within Western Australia. This infrastructure will facilitate the integration of the fields of materials research, new device technologies, integrated circuit technology, nanotechnology and photonics in the expanding field of Opto-VLSI. The proposed equipment is being built upon targeted research in VLSI, and will create an additional platform for innovations in microelectronic technology applicable to the communications, information technology, energy generation, security, and biomedical fields.