Spectroscopic Imaging Ellipsometry for Opto-VLSI Engineering and Nanotechnology Applications

用于光学超大规模集成电路工程和纳米技术应用的光谱成像椭偏仪

• 批准号: LE0345794
• 负责人: A/Prof Steven Hinckley
• 金额: $ 13.65万
• 依托单位: Edith Cowan University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2003
• 资助国家: 澳大利亚
• 起止时间: 2003-02-10 至 2003-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE0345794
• 关键词: Spectroscopic; Imaging; Ellipsometry; Opto; VLSI

The focus for implementation of spectroscopic imaging ellipsometry is to create a powerful optical analysis and characterisation tool to complement the advanced integrated circuit test facilities within Western Australia. This infrastructure will facilitate the integration of the fields of materials research, new device technologies, integrated circuit technology, nanotechnology and photonics in the expanding field of Opto-VLSI. The proposed equipment is being built upon targeted research in VLSI, and will create an additional platform for innovations in microelectronic technology applicable to the communications, information technology, energy generation, security, and biomedical fields.

光谱成像椭圆偏振测量的重点是创建一个强大的光学分析和表征工具，以补充西澳大利亚州先进的集成电路测试设施。这一基础设施将促进材料研究、新器件技术、集成电路技术、纳米技术和光子学等领域在不断扩大的光超大规模集成电路领域的整合。拟议的设备是建立在超大规模集成电路的有针对性的研究，并将创建一个新的平台，适用于通信，信息技术，能源生产，安全和生物医学领域的微电子技术的创新。