Fabrication of Multi Nano-array Electrodes with High Aspect Ratio Using Quantum Beam Irradiation

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The precision nano/ micro-fabrication of perfluorinated polymers including crosslinked one was carried out using various ion beams. Then, the sample which functionalized by graft polymerization and supported the silver ion was prepared. The direct reduction in the solid phase was performed by the quantum beam irradiation, and the obtained materials were analyzed with SEM-EDX and XPS. As results, the pure silver nanoparticle has been detected. Moreover, the array electrode with 60. m square can produce. It is succeeded that 800nm-width structures would be fabricated by direct patterning.