Highly-dispersive micro prismwith a metal-and-dielectric layered media

采用自下而上填充化学镀铜工艺，在硅片波导中制作了金属介电周期结构的波长色散微棱镜。棱镜将光波分散成一个光谱。基于有效介质理论，推导了各向同性介质与金属-介质周期结构交界面光反射率的计算公式。此外，我们还证明了金属-介质周期结构的透射谱与入射光的角度无关。

A wavelength-dispersive micro prism with metal-and-dielectric periodic structure was fabricated in a silicon slab-waveguide by using a technique of the bottom-up fill electroless copper plating. The prism dispersed light waves into a spectrum. A formula for estimating a reflectance of light at the interface between isotropic medium and the metal-and-dielectric periodic structure was derived based on the effective medium theory. Moreover, we demonstrated that a transmission spectrum of the metal-and- dielectric periodic structure was independent from the angle of incidence of light.