Evaluation of high frequency properties of transparent zinc oxide thin films and their application

为了促进现代通信设备和通信网络的发展，天线等高频模块的小型化和抑制干扰的问题日益突出。为了克服这些问题，我们正在开发用于高频应用的透明器件。根据这一概念，显示空间可以用于安装透明的高频设备。本研究对ZnO等透明薄膜的高频特性进行了评价，并对透明器件的高频结构进行了优化。

In order to promote modern communications equipment and communication networks, issues for miniaturization and inhibition of interference in high-frequency module, such as antenna, grew increasingly apparent. To overcome them, we are developing transparent device for the high-frequency applications. Adapting this concept, space for display can be used for mounting the transparent high-frequency devices. In this study, properties at high-frequencyof transparent thin films, such as ZnO of which studies had not been enough, are evaluated, and optimize structure of the transparent device at high-frequency is proposed.