High speed deposition of zinc oxide film using atmospheric pressure glow discharge

用于液晶显示器或太阳能电池等的透明导电薄膜必须以低成本的系统大面积制造。因此，我在常压下产生冷等离子体，并开发了氧化锌薄膜的沉积系统。为了大面积均匀地制备薄膜，将狭缝宽度扩大到100mm。制备了均匀薄膜。主题仍然是关于沉积速率的改善。

Transparent conductive thin films used for a liquid crystal display or a solar cell etc. have to fabricated in large area with low cost system. Therefore, I generated coldplasma under atmospheric pressure, and developed the deposition system of Zinc oxide films. For fabricating thin films uniformly in large area, slit width was expanded into 100 mm. The uniform films were fabricated. The subject remained about improvement in deposition rate.