Experimental plastic flow analysis under the Extra-high pressure by a diamond three-dimensional micro mold

本研究在无润滑剂的情况下，利用金刚石模具在大气和真空中对铝膜进行压缩成形，以评价在这两种条件下形成的铝膜的转录质量和金相组织。在金刚石模具中，利用聚焦离子束(FIB)系统在一对金刚石顶锤的顶头上形成三维微腔。高压塑性成形后，铝膜的平均晶粒度由传统金刚石模具时的20~30μm减小到1μm以下。

This study is conducted to carry out the compression forming of aluminum films using a diamond mold in atmosphere and vacuum without the use of lubricant, in order to evaluate the transcription quality and metallographic struc ture of such films formed under the two conditions. In the diamond mold, three-dimensional microcavities are formed on the culets of a pair of diamond anvils, using a focused ion beam (FIB) system. It was also confirmed that the average grain size of the a luminum film, which was 20-30 μm when a conventional diamond die was used, was reduced to 1 μm or less after the high-pressure plastic forming.