Experimental plastic flow analysis under the Extra-high pressure by a diamond three-dimensional micro mold

采用金刚石模具在大气和真空中无润滑条件下对铝膜进行压制成形，以评价两种条件下所形成的铝膜的转印质量和金相组织。在金刚石模具中，使用聚焦离子束（FIB）系统在一对金刚石砧的底脚上形成三维微腔。还证实了铝膜的平均晶粒尺寸在高压塑性成形后减小到1 μm或更小，当使用常规金刚石模具时，铝膜的平均晶粒尺寸为20-30 μm。

This study is conducted to carry out the compression forming of aluminum films using a diamond mold in atmosphere and vacuum without the use of lubricant, in order to evaluate the transcription quality and metallographic struc ture of such films formed under the two conditions. In the diamond mold, three-dimensional microcavities are formed on the culets of a pair of diamond anvils, using a focused ion beam (FIB) system. It was also confirmed that the average grain size of the a luminum film, which was 20-30 μm when a conventional diamond die was used, was reduced to 1 μm or less after the high-pressure plastic forming.