Examination of 3D-matrix superconducting micro-strip lines and its application to filters

3D矩阵超导微带线检验及其在滤波器中的应用

• 批准号: 22560317
• 负责人: OHSHIMA Shigetoshi
• 金额: $ 3.08万
• 依托单位: Yamagata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22560317/
• 关键词: マイクロ波; ミリ波; 超伝導フィルタ; バンドパスフィルタ; 高耐電力フィルタ; 積層エピタキシャル; 窒化ニオブ薄膜; 高温超伝導; 無線通信; ドライエッチング; 高温超伝導薄膜; エピタキシャル成長; 積層膜; YBCO

The power handling capability of superconducting filters made by micro-strip lines is small, therefore, the filters cannot be used to the transmitting filters. The limit of power handling capability of filters is caused by the current concentration at the outer edge of a micro-strip line. Therefore, it is very important to reduce the current concentration on the outer edge of a micro-strip line. In this project, we examined the improvement of power handling capability of the filters made by the 3D-matrix micro-strip lines. The 3D-matrix micro-strip line filters were made by following process. First, we made a three-layered film, NbN-AlN-NbN by reactive dc magnetron sputtering. Then the filters were patterned using a conventional photolithography technique. The micro-strip lines were etched by dry etching to divide into the narrow lines. We measured a power handling capability of the filters, and found that the value increased by about 3.1 dB compared with that of the conventional micro-strip line filter. This means that current flowing along the outer edge of the 3D-marix micro-strip line(3D-SMSL) is less concentrated than in the conventional micro-strip line. The 3D-SMSL is useful to increase a power handling capability of a filter.

用微带线制作的超导滤波器功率容量小，不能用于发射滤波器。滤波器的功率处理能力的极限是由微带线外缘的电流集中引起的。因此，减小微带线外缘的电流集中是非常重要的。在这个项目中，我们研究了由3D矩阵微带线制成的滤波器的功率处理能力的改善。采用以下工艺制作了三维矩阵微带线滤波器。首先，我们用直流磁控溅射法制备了NbN-AlN-NbN三层薄膜。然后，使用常规的光刻技术图案化过滤器。采用干法刻蚀的方法对微带线进行刻蚀，将微带线分割成窄的线条。我们测量了滤波器的功率处理能力，并发现该值与传统的微带线滤波器相比增加了约3.1 dB。这意味着与传统微带线相比，沿着3D矩阵微带线（3D-SMSL）的外边缘流动的电流不那么集中。3D-SMSL可用于增加滤波器的功率处理能力。

项目成果

Use of double-layer coupling circuit and additional patxh conductors to improuve power handling capability of HTS transmit filter

使用双层耦合电路和额外的 patxh 导体来提高 HTS 发射滤波器的功率处理能力

• DOI: 10.1016/j.phpro.2012.03.478
• 发表时间: 2012
• 期刊: Physics Procedia
• 作者: N.Imai;N.Sekiya;S.Kakio;S. Ohshima
• 通讯作者: S. Ohshima

Hetero-Epitaxial Growth of YBCO and MgB 2 Thin Films on Decorated Substrates with Nano-Wires and Nano-Particles

纳米线和纳米颗粒装饰基底上异质外延生长YBCO和MgB 2 薄膜

• DOI: 10.1557/opl.2012.1485
• 发表时间: 2012
• 作者: S. Ohshima

Improvement in Power Handling Capability of Superconducting Filters Using Multi-Layered Microstrip Line Resonators

使用多层微带线谐振器提高超导滤波器的功率处理能力

• DOI: 10.1109/tasc.2010.2089772
• 发表时间: 2011
• 期刊: IEEE Trans. Superconductivity
• 作者: Y.Endo;S. Ono;M.Uno;T.Saito;K.Nakajima;S. Ohshima
• 通讯作者: S. Ohshima

Fabrication and Evaluation of Multi-Layered YBCO/CeO2 Films

多层 YBCO/CeO2 薄膜的制备与评估

• 发表时间: 2012
• 作者: S. Takahashi;S.Oikawa;A.Saito;S. Ohshima
• 通讯作者: S. Ohshima

3次元マトリックス線路を用いた超伝導フィルタの高耐電力化

使用 3D 矩阵线的超导滤波器的高功率耐用性

• 发表时间: 2012
• 作者: 高橋峻平;秋谷守紀;齊藤敦;大嶋重利
• 通讯作者: 大嶋重利