Fabrication of oxide nanostructures using electron beaminduced deposition and their physical properties

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Electron beam induced deposition (EBID) is one of the promising techniques to produce position-controlled nanometer-sized structures with high flexibility in their shape. In this process, an organometallic compound gas or vapor is decomposed by electron beam and the non-volatile part of the decomposed gas is deposited on substrates. In this research, oxide and gold nanostructures were fabricated using EBID and the photoconductive properties were studied on molybdenum oxide nanostructures.