Development of the multifunctional thin-film evaluation technology by a quantum beam, and the elucidation of the membrane generation process created by the PLD method

开发利用量子束的多功能薄膜评价技术以及阐明利用PLD方法创建的膜生成过程

• 批准号: 22760090
• 负责人: SHIRAKIHARA Kaori
• 金额: $ 2.83万
• 依托单位: Suzuka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760090/
• 关键词: 材料設計; プロセス; 物性; 評価; レーザーアブレーション; 小型PLD製膜装置; 高機能薄膜生成

The purpose of this research is the creation of a low environmental impact type functionality thin film and the establishment of the material-characteristics evaluation technology by neutron beam. A design and trial production of thin film creation equipment with an expensive ready-made article were performed. The machine has a minimum function and extendibility and succeeded in production of small PLD (Pulsed Laser Deposition) equipment which has 600 mm long, 600 mm wide, and 800 mm in height.The combination of the ferroelectric ceramics which is excellent in the response, and the shape memory alloy which can expect generating of large deformation was examined, by the equipment of one's own making. As a result, for composition control of the shape memory alloy, it found out the distance of a substrate and a material target, and that membrane generation time influenced.

本研究旨在制备低环境影响型功能性薄膜，并建立中子束材料特性评价技术。用一种昂贵的现成物品进行了薄膜形成装置的设计和试制。该机具有最小的功能和可扩展性，成功生产了长600mm，宽600mm，高800mm的小型PLD（脉冲激光沉积）设备。利用自制的仪器，研究了响应性能优异的铁电陶瓷与可产生较大变形的形状记忆合金的结合。结果表明，对于形状记忆合金的成分控制，找出了衬底与材料靶的距离，以及膜生成时间的影响。