Simple and simultaneous measurement of five-degrees-of-freedom error motions of high-speed microspindle
Simple and simultaneous measurement of five-degrees-of-freedom error motions of high-speed microspindle
批准号:
22760100
负责人:
MURAKAMI Hiroshi
金额:
$2.41万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Young Scientists (B)
财政年份:
2010
资助国家:
日本
项目状态:
已结题
起止时间:
2010 至 2012
中文摘要
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英文摘要
We present an optical technique to measure five-degree-of-freedom error motions of a high-speed microspindle. The measurement system consists of a rod lens, a ball lens, four divided laser beams, and multiple divided photodiodes. When the spindle rotates with its concomitant rotation errors, the rod and ball lenses, which are mounted to the chuck of the spindle, are displaced, and this displacement is measured using an optical technique. The results show that the measurement system has a resolution of 5 nm and can be used to evaluate high-speed microspindle rotation errors.
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Simple and Simultaneous Measurement of Five-Degrees-of-Freedom Error Motions for a Micro High-Speed Spindle
微型高速主轴五自由度误差运动的简单同步测量
DOI:
--
发表时间:
2012
期刊:
影响因子:
--
作者:
[Hiroshi MURAKAMI, Akio KATSUKI, Takao SAJIMA, Noriya NAKAYAMA]
通讯作者:
Noriya NAKAYAMA
Measurement of Five-Degrees-of-Freedom Error Motions for a Micro High-Speed Spindle Using an Optical Technique
利用光学技术测量微型高速主轴的五自由度运动误差
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[H. Waki, T. Kitamura, H. Ogi, A. Kobayashi, Hiroshi MURAKAMI]
通讯作者:
Hiroshi MURAKAMI
高速小径主軸5自由度運動誤差の簡易同時計測-誤差解析および評価実験-
简单同时测量高速小直径主轴5个自由度运动误差-误差分析与评估实验-
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[村上洋, 甲木昭雄, 鬼鞍宏猷, 佐島隆生, 中山義野]
通讯作者:
中山義野
Optical Measurement of Five-Degree-of-Freedom Error Motions for a Micro High-Speed Spindle
微型高速主轴五自由度误差运动的光学测量
DOI:
--
发表时间:
2010
期刊:
影响因子:
--
作者:
[Hiroshi MURAKAMI, Norio KAWAGOISHI, Eiji KONDO, Akira KODAMA]
通讯作者:
Akira KODAMA
高速小径主軸 5 自由度運動誤差の簡易同時測定-誤差解析および評価実験-
简单同时测量高速小直径主轴5自由度运动误差-误差分析与评估实验-
DOI:
--
发表时间:
2012
期刊:
影响因子:
--
作者:
[M. Okayasu, S. Takasu, A. Niikura, S. Okano and T. Shiraishi, 村上 洋,甲木 昭雄,鬼鞍 宏猷,佐島 隆生,近藤英二]
通讯作者:
村上 洋,甲木 昭雄,鬼鞍 宏猷,佐島 隆生,近藤英二
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