Development of Micro Sensors for Measuring Charge Distribution on Insulators

开发测量绝缘体电荷分布的微型传感器

• 批准号: 22686030
• 负责人: KUMADA Akiko
• 金额: $ 16.31万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (A)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010-04-01 至 2013-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22686030/
• 关键词: 電気エネルギー工学; 帯電; 電気機器; 低炭素社会; 電荷センサ; ガス絶縁; 誘電体界面現象; MEMS; 静電気放電; 沿面放電; 微小ギャップ

Sensors with high time and spece resolution were challenged to be developed for for measuring propagating surface discharge. First, a micro sensor was proposed based on MEMS technology and a prototype was assembled. It turned out, however, the internal insulation strength of micro sensor was not enough for measuring discharge phenomena. Thus, the electro-optic sensor with 1ns and 3micro resolutions were developed and applied to the surface discharge measurement. From the comparison with the measured data and the numerically simulated results based on continuity equation, the critical condition for keeping propagation was clarified..Breakdown phenomenon across micrometer-scale gap was also measured. And it turned out that the discharge process in such a small gap has a similar characteristics of discharge in vacuum.

高时间分辨率和高形态分辨率的表面放电传感器是测量传播表面放电的一个挑战。首先，提出了一种基于MEMS技术的微传感器，并组装了样机。然而，微传感器内部的绝缘强度不足以测量放电现象。为此，研制了1ns和3micro分辨率的电光传感器，并将其应用于表面放电测量。通过与实测数据和基于连续性方程的数值模拟结果的比较，明确了保持传播的临界条件，并测量了微米尺度间隙上的击穿现象。结果表明，在这种小间隙内的放电过程具有与真空放电相似的特性。

项目成果

Directly High-Voltage Measuring System Based on Pockels Effect

• DOI: 10.1109/tpwrd.2013.2250315
• 发表时间: 2013-07-01
• 期刊: IEEE TRANSACTIONS ON POWER DELIVERY
• 影响因子: 4.4
• 作者: Kumada, Akiko;Hidaka, Kunihiko
• 通讯作者: Hidaka, Kunihiko

Shack-Hartmann Type Laser Wavefront Sensor for Measuring Electron Density in Low Current Arc

用于测量低电流电弧中电子密度的夏克-哈特曼型激光波前传感器

• DOI: 10.1541/ieejfms.131.872
• 发表时间: 2011
• 期刊: IEEJ Transactions on Fundamentals and Materials
• 作者: 稲田優貴;松本洋和;松岡成居;熊田亜紀子;池田久利;日高邦彦
• 通讯作者: 日高邦彦

Void-free encapsulation technique for semiconductor devices using silicone gel

使用硅胶的半导体器件无空隙封装技术

• 发表时间: 2013
• 作者: M. Sato;A. Kumada;K. Hidaka;K. Yamashiro;Y. Hayase;T. Takano
• 通讯作者: T. Takano

電気光学センサによる高電圧・放電現象の計測

使用电光传感器测量高电压和放电现象

• 发表时间: 2011
• 作者: 野田慶一;寺井慶和;三浦直行;鵜殿治彦;藤原康文;熊田亜紀子
• 通讯作者: 熊田亜紀子

The influence of residual charge on surface discharge propagation

残余电荷对表面放电传播的影响

• DOI: 10.1088/0022-3727/43/49/495203
• 发表时间: 2010-12
• 期刊: Journal of Physics D: Applied Physics
• 作者: Junbo Deng;Shigeyasu Matsuoka;Akiko Kumada;Kunihiko Hidaka
• 通讯作者: Kunihiko Hidaka