Construction of III-V CMOS Photonics

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We have successfully established the fabrication procedure of III-V-on-Insulator (III-V-OI) wafers by using the direct wafer bonding technology. As a result, we have demonstrated high-performance optical switches/modulators and waveguide photodetectors on the III-V-OI wafer in addiction to InP-based photonic-wire passive devices. We have also established the fabrication procedure of InGaAs MOS transistors on the III-V-OI wafer.Thus, we have successfully demonstrated the basic concept of the III-V CMOS photonics platform on which ultra-small III-V-based photonic-wire devices and high-performance III-V-based CMOS transistors can be co-integrated by using the III-V-OI wafer.