Investigation of high brightness property of Li-LMES for nano-focued X-ray microscope

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In this study, we verified emission properties of Lithium liquid metal electron source (Li-LMES) as one of candidate of electron source for high-resolution X-ray microscope used in a field of nanotechnology. Our newly developed an X-ray microscope equipped with Li-LMES. Under condition of the acceleration voltage of 7 kV, the target current of 14 nA could be obtained by using Li-LMES, which value is three orders of magnitude higher than a conventional W field-emitter due to high current density of Li-LMES. The value of the target current was not enough to establish a contrast for X-ray imaging. For getting time-resolved X-ray images, we must consider new electron optics with higher transparency.