Investigation of high brightness property of Li-LMES for nano-focued X-ray microscope

纳米聚焦X射线显微镜Li-LMES高亮度特性研究

• 批准号: 23360021
• 负责人: HATA Koichi
• 金额: $ 12.4万
• 依托单位: Mie University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360021/
• 关键词: Taylorコーン; Ｘ線顕微鏡; リチウム; 液体金属電子源; 超高真空走査型電子顕微鏡; 電界放射型陰極; 電界放射陰極; X線顕微鏡; 電界放出

In this study, we verified emission properties of Lithium liquid metal electron source (Li-LMES) as one of candidate of electron source for high-resolution X-ray microscope used in a field of nanotechnology. Our newly developed an X-ray microscope equipped with Li-LMES. Under condition of the acceleration voltage of 7 kV, the target current of 14 nA could be obtained by using Li-LMES, which value is three orders of magnitude higher than a conventional W field-emitter due to high current density of Li-LMES. The value of the target current was not enough to establish a contrast for X-ray imaging. For getting time-resolved X-ray images, we must consider new electron optics with higher transparency.

在这项研究中，我们验证了锂液态金属电子源（Li-LMES）的发射特性，作为纳米技术领域中使用的高分辨率X射线显微镜的电子源的候选者之一。我们新开发的配备Li-LMES的X射线显微镜。在加速电压为7 kV的条件下，Li-LMES可获得14 nA的目标电流，由于Li-LMES的高电流密度，其值比常规W场发射体高3个数量级。靶电流值不足以建立X射线成像的对比度。为了获得时间分辨的X射线图像，我们必须考虑具有更高透明度的新电子光学。

项目成果

Newly Designed High Resolution X-ray Microscope with a Liquid Lithium Field Emission Electron Source

新设计的高分辨率 X 射线显微镜，配备液态锂场发射电子源

• 发表时间: 2012
• 作者: K. Hata;R. Nagai;S.Nagai
• 通讯作者: S.Nagai