Development of Lead-Free Biocompatible Multi-Layer Thin-film Structure Generation Technology for Implantable Actuator and Energy Harvest Device

我们开发了一种用于植入式驱动器和能量收集装置的无铅生物相容性多层薄膜结构生成技术，如下所示：（1）通过第一性原理计算得到所设计的混合晶体Ti掺杂MSO的压电应力常数为0.696（C/m2），是MSO的1.52倍。压电常数d33为354.8pm/V。（2）最佳后退火温度为676 ℃，四元MgSiO_3晶化率为90.5%，在10层薄膜上得到了高晶化率的四元MgSiO_3。其压电常数d33为406.1pm/V。（3）在15 V的电压下，单晶MSO悬臂梁驱动器可以产生几十nm的振动。(4)磁感应混合振动能量采集器，采用单晶MSO和PVDF压电悬臂梁，产生1.2微W。我们证实，该装置可以提供一个足够的电源植入生物MEMS器件。

We developed a lead-free biocompatible multi-layer thin-film structure generation technology for implantable actuator and energy harvest device, as demonstrated below: (1) Piezoelectric stress constants of designed mixed crystals, Ti doped MSO, obtained by the first-principle calculations was 0.696(C/m2), which is 1.52 times larger than MSO. Piezoelectric constant d33 was 354.8pm/V. (2) Optimum post-annealing temperature was obtained as 676 centigrade, its crystallization of tetragonal MgSiO3 was 90.5%.High crystallization of tetragonal MgSiO3 was obtained on generated ten-layered thin film. Its piezoelectric constant d33 was 406.1 pm/V. (3) Mono-morph MSO cantilever actuator could be vibrated with the amplitude tens nm under 15 Voltage. (4) A magnetic induced hybrid vibration energy harvester, which employed the mono-morph MSO and PVDF piezoelectric cantilever, generated 1.2 microW. We confirmed that this device can provide a sufficient power for implantable Bio-MEMS device.