Development of Lead-Free Biocompatible Multi-Layer Thin-film Structure Generation Technology for Implantable Actuator and Energy Harvest Device

我们开发了一种用于植入式致动器和能量收集装置的无铅生物相容性多层薄膜结构生成技术，结果如下：(1)通过第一性原理计算得到的混合晶体Ti掺杂MSO的压电应力常数为0.696(C/m2)，是MSO的1.52倍。压电常数d33为354.8pm/V。(2)最佳退火温度为676℃，其结晶率为90.5%。在生成的十层薄膜上获得了高结晶性的四方MgSiO3。其压电常数d33为406.1 pm/V。(3)在15电压下，单晶MSO悬臂执行器的振动幅值可达数十nm。(4)采用单晶型MSO和PVDF压电悬臂梁的磁致混合振动能量采集器产生了1.2微米的能量。我们证实该器件可以为植入式Bio-MEMS器件提供足够的功率。

We developed a lead-free biocompatible multi-layer thin-film structure generation technology for implantable actuator and energy harvest device, as demonstrated below: (1) Piezoelectric stress constants of designed mixed crystals, Ti doped MSO, obtained by the first-principle calculations was 0.696(C/m2), which is 1.52 times larger than MSO. Piezoelectric constant d33 was 354.8pm/V. (2) Optimum post-annealing temperature was obtained as 676 centigrade, its crystallization of tetragonal MgSiO3 was 90.5%.High crystallization of tetragonal MgSiO3 was obtained on generated ten-layered thin film. Its piezoelectric constant d33 was 406.1 pm/V. (3) Mono-morph MSO cantilever actuator could be vibrated with the amplitude tens nm under 15 Voltage. (4) A magnetic induced hybrid vibration energy harvester, which employed the mono-morph MSO and PVDF piezoelectric cantilever, generated 1.2 microW. We confirmed that this device can provide a sufficient power for implantable Bio-MEMS device.