Development of new cleaning-removal system using cryogenic micro-nano solid spray

采用一种新型的集成测量耦合数值方法，研究了低温微纳固体氮气喷雾流热机抗蚀剂去除清洗系统的基本特性。阐明了由于抗蚀剂材料的热收缩，超高热流冷却对抗蚀剂去除性能的影响。数值模拟结果表明，在抗蚀剂之间的狭窄区域内，微固体氮粒子的塑性变形对抗蚀剂的刮擦作用可以改善抗蚀剂的去除性能。此外，它是数值和实验发现，混合的流体机械力的相互作用的影响，由微固体颗粒的冲击和热机械效应，由于超高的传热特性，有助于抗蚀剂去除清洗过程。

The basic characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano solid nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-solid nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-solid particles and the thermomechanical effect due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.