Development of new cleaning-removal system using cryogenic micro-nano solid spray

低温微纳固体喷雾新型清洗去除系统的开发

• 批准号: 23360080
• 负责人: ISHIMOTO Jun
• 金额: $ 12.06万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360080/
• 关键词: 混相流; 極低温; 微粒化; 熱伝達; ナノ洗浄; 冷却; 固体窒素; 噴霧; 相変化

The basic characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano solid nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-solid nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-solid particles and the thermomechanical effect due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.

采用一种新型的集成测量耦合数值技术，研究了低温微纳固体氮喷雾流热机械式抗蚀剂去除-清洗系统的基本特性。阐明了超高热流密度冷却对阻胶材料热收缩对阻胶去除性能的影响。通过数值模拟预测，微固体氮颗粒在抗蚀剂之间的狭窄区域产生塑性变形，从而产生刮擦效应，从而提高抗蚀剂的去除性能。此外，通过数值模拟和实验研究发现，微固体颗粒撞击产生的流体力学力和超高传热特性产生的热力学效应的混合交互作用是阻垢去除-清洗过程的主要原因。

项目成果

Thermomechanical Resist Removal-Cleaning System Using Cryogenic Micro-Slush Jet

使用低温微泥射流的热机械抗蚀剂去除清洗系统

• 发表时间: 2010
• 期刊: Proceedings of The Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS)
• 作者: T.Masuzawa;A.Ohta;N.Tanaka;Y.Qian;T.Tsukiya;矢野,足立,堀,千田,藤本;Jun Ishimoto
• 通讯作者: Jun Ishimoto

Integrated Research Collaboration for Frontier Science of Next Generation Reactive Fluid

下一代反应流体前沿科学综合研究合作

• 作者: Koji Hasegawa;Kuniharu Shitanishi;Akiko Kaneko;Yutaka Abe;坪井涼 大島康嗣 中野彬 佐々木信也;Jun Ishimoto
• 通讯作者: Jun Ishimoto

微細固体窒素スプレーを用いたウエハレジストはく離－洗浄特性に関する研究

精细固体氮喷雾晶圆抗蚀剂剥离及清洗特性研究

• 作者: Jia-ming GONG;Nobuyuki OSHIMA;Yutaka TABE;大村洸平，松本聡，依田眞一，金子暁子，;長谷川雄史 坪井涼 佐々木信也;王 宇
• 通讯作者: 王 宇

Ultra-High Heat Flux Cooling Characteristics of Cryogenic Micro-Solid Nitrogen Particles and Its Application to Semiconductor Wafer Cleaning Technology

低温微固体氮颗粒超高热流冷却特性及其在半导体晶圆清洗技术中的应用

• DOI: 10.1063/1.4860828
• 发表时间: 2014
• 期刊: Advances in Cryogenic Engineering
• 作者: Jun Ishimoto;U Oh;Zhao Guanghan;Tomoki Koike and Naoya Ochiai
• 通讯作者: Tomoki Koike and Naoya Ochiai

Ultra-Cooling Heat Transfer Characteristics Using Cryogenic Micosolid Nitrogen Spray

使用低温微固体氮气喷雾的超冷传热特性

• 发表时间: 2012
• 期刊: Proceedings of the ASME 2012 Summer Heat Transfer Conference
• 作者: U Oh;Jun Ishimoto;Naoki Harada and Daisuke Tan
• 通讯作者: Naoki Harada and Daisuke Tan