Development of new cleaning-removal system using cryogenic micro-nano solid spray

采用一种新型的集成测量耦合数值技术，研究了低温微纳固体氮喷雾流热机械式抗蚀剂去除-清洗系统的基本特性。阐明了超高热流密度冷却对阻胶材料热收缩对阻胶去除性能的影响。通过数值模拟预测，微固体氮颗粒在抗蚀剂之间的狭窄区域产生塑性变形，从而产生刮擦效应，从而提高抗蚀剂的去除性能。此外，通过数值模拟和实验研究发现，微固体颗粒撞击产生的流体力学力和超高传热特性产生的热力学效应的混合交互作用是阻垢去除-清洗过程的主要原因。

The basic characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano solid nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-solid nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-solid particles and the thermomechanical effect due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.