Piezoelectric thick film more than 100 miro-meters deposited by the ultrasonic assisted hydrothermal method

超声辅助水热法沉积100微米以上压电厚膜

• 批准号: 23360134
• 负责人: MORITA Takeshi
• 金额: $ 11.56万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360134/
• 关键词: 厚膜; 強誘電・圧電薄膜合成技術; 強誘電・圧電薄膜; 水熱合成法

For medical ultrasonic devices and micro piezoelectric actuators, thick piezoelectric films are strongly demanded. In the conventional piezoelectric film deposition processes, the thickness have been limited because the crack was easily made inside the film due to high temperature crystallization process more than 600 degree C.In this study, we focused on the hydrothermal method whose reaction temperature is 250 degree C. By developing the ultrasonic assisted hydrothermal method, we demonstrated a 172 micrometer thickness of potassium niobate film.

医用超声器件和微型压电驱动器对厚的压电薄膜有着强烈的需求。在传统的压电薄膜沉积工艺中，由于在600℃以上的高温结晶过程中，薄膜内部容易产生裂纹，因此厚度受到限制。在本研究中，我们重点研究了反应温度为250℃的水热法。通过开发超声波辅助水热法，我们展示了172微米厚度的铌酸钾薄膜。

项目成果

Hydrothermal method for piezoelectric materials and their applications

水热法压电材料及其应用

• 发表时间: 2013
• 作者: Takeshi Morita

The hardening of CuO–(K,Na)NbO3 via post annealing with argon

• DOI: 10.7567/jjap.53.015503
• 发表时间: 2013
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: Yaoyang Liu;T. Maeda;Y. Yokouchi;T. Morita

Synthesis of piezoelectric materials by ultrasonic hydrothermal method

超声水热法合成压电材料

• 发表时间: 2011
• 作者: Gaku ISOBE;Ryo AGEBA;Takafumi MAEDA;Peter BORNMANN;Tobias HEMSEL;Takeshi MORITA
• 通讯作者: Takeshi MORITA

(K_0.48Na_0.52)NbO_3 ceramics using powders synthesized by ultrasonic assisted hydrothermal method

超声波辅助水热法合成粉体(K_0.48Na_0.52)NbO_3陶瓷

• 发表时间: 2012
• 作者: Gaku Isobe;Takufumi Maeda;Kanako Ohta;Yuriko Yokouchi;Peter Bornmann;Tobias Hemsel and Takeshi Morita
• 通讯作者: Tobias Hemsel and Takeshi Morita

超音波アシスト水熱合成法のための高温対応振動子の開発

超声辅助水热合成高温振荡器的研制

• 发表时间: 2011
• 作者: 五十部学;ペーター・ボーンマン;トビアス・ヘムゼル;森田剛
• 通讯作者: 森田剛