Piezoelectric thick film more than 100 miro-meters deposited by the ultrasonic assisted hydrothermal method

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For medical ultrasonic devices and micro piezoelectric actuators, thick piezoelectric films are strongly demanded. In the conventional piezoelectric film deposition processes, the thickness have been limited because the crack was easily made inside the film due to high temperature crystallization process more than 600 degree C.In this study, we focused on the hydrothermal method whose reaction temperature is 250 degree C. By developing the ultrasonic assisted hydrothermal method, we demonstrated a 172 micrometer thickness of potassium niobate film.