30 GHz MEMS varibale capacitor utilizing pico-liter droplet

本研究的目的是利用纯水中电容器的介电常数变化80的新原理进行研究。在研究过程中，0.1 nL的水滴可以在10 μ m的间隙中传输。用这种可变电容制作了工作频率为1-6 GHz的带阻滤波器。实验结果表明，在10 μ m间隙内的水滴可以被传输，带水的可变电容器可以工作在10 GHz，并且通过可变BEF的成功，该结果可以应用于真实的滤波器。

The research on a novel principle utilizing the change of 80 in the permittivity in a capacitor with pure water is objective in this research. During the research, 0.1 nL water droplet could be transported in a 10 um gap. By using this varibale capacitor, a band elimination filter (BEF) for the operation of 1-6 GHz was fabricated. Note that it was indicated that water droplet in a 10 um gap could be transported, variable capacitor with water could be operated in 10 GHz, and the result could be adopted to a real filter by the success in the varibale BEF.