30 GHz MEMS varibale capacitor utilizing pico-liter droplet

研究一种利用纯水电容器介电常数变化80的新原理是本研究的目的。在研究过程中，0.1毫升的水滴可以在10微米的间隙中传输。利用该电容制作了工作频率为1~6 GHz的带阻滤波(BEF)。结果表明，在10微米的带隙内可以实现水滴的传输，在10 GHz内可以实现带水的可变电容的工作，并通过在变幅BEF上的成功应用于实际的滤光片。

The research on a novel principle utilizing the change of 80 in the permittivity in a capacitor with pure water is objective in this research. During the research, 0.1 nL water droplet could be transported in a 10 um gap. By using this varibale capacitor, a band elimination filter (BEF) for the operation of 1-6 GHz was fabricated. Note that it was indicated that water droplet in a 10 um gap could be transported, variable capacitor with water could be operated in 10 GHz, and the result could be adopted to a real filter by the success in the varibale BEF.