Development of high-energy assisted processes for precise micro forming

点击翻译按钮获取中文摘要

A highly precise and efficient process with assistance of high-density energy (HDE) was developed for micro surface forming. By concentrating high-density energy on the material surface using ultrasonic vibration etc., the plastic deformation limited to the surface can be induced, and the technique was applied successfully to smooth the surface, or to transfer micro patterns into surface of the materials. Furthermore, the mechanism for the deformation was clarified experimentally and numerically. The optimal process design using size effects accompanying demagnification of a material, such as increase of specific surface area and reduction of the heat capacity, was performed.