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Self-organization of adsorbate crystal morphology on a heteroepitaxial surface

异质外延表面吸附物晶体形态的自组织

基本信息

批准号：
23540456
负责人：
SAITO YUKIO
金额：
$ 2.83万
依托单位：
Keio University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2011
资助国家：
日本
起止时间：
2011 至 2013
项目状态：
已结题

项目摘要

In heteroepitaxial growth, materials of the substrate and of the overlayer crystal are different. In order to decrease the effect of strain energy induced by the lattice misfit, nanostructures are sometimes fabricated on a substrate. We found that the crystal dewetting is different from the liquid dewetting; for instance, an adsorbate crystal island arranges itself in an asymmetric position on a substrate pillar, or a crystal island collapses only partially. When Si islands evaporate on SiO2 substrate at high temperatures, they diffuse around with a diffusion constant almost independent of the island size. We attributed this anomalous diffusion to the pinning-depinning phenomenon of the island edge at rough corners of the Si/SiO2 interface produced by chemical reactions. We also studied scaling behavior of the grain coarsening during the unidirectional solidification of multicrystals on a substrate.

在异质外延生长中，衬底和覆盖层的材料是不同的。为了减小晶格失配引起的应变能的影响，有时需要在衬底上制备纳米结构。我们发现，晶体的脱湿不同于液体的脱湿，例如，吸附的晶岛在衬底柱上以不对称的位置排列，或者晶岛只部分坍塌。当硅岛在高温下在二氧化硅衬底上蒸发时，它们以几乎与岛的大小无关的扩散常数扩散。我们将这种反常扩散归因于化学反应在Si/SiO_2界面粗糙拐角处产生的岛状边缘钉扎-脱钉现象。我们还研究了多晶定向凝固过程中晶粒粗化的尺度行为。