Development of wheel spindle equiped with wheel infeed system

点击翻译按钮获取中文摘要

A wheel spindle equipped with both rotary motion and axial infeed motion is developed. Since axial spindle position is monitored by using a capacitance type gap sensor and fed back to the linear actuator, axial spindle position can be precisely controlled even when variety of axial force is loaded during grinding. Due to the radial bearing employed water for working fluid, this system is environmental free. Rotational accuracy of the spindle is 0.23 micrometer, and static stiffness of axial direction was 1060 N/micrometer. As the results, surface roughness of ground silicon wafer, using the grain size of 3000 diamond wheel, was 2nmRa.