Effects of Surface Roughness on Application of Micro Displacement Characteristics to Nano-positioning

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In this study, using the tangential micro-displacement characteristics between the contact surfaces under a tangential force, a basic idea is proposed for developing the nanoscale positioning system. To confirm this idea, the experiments were carried out by measuring the differential displacement between a rough brass surface and a smooth ceramic surface under various forms of cyclic tangential force.When maximum of the tangential force exceeds the critical friction force, effective micro- displacement was obtained as about 1nm after every cycle of tangential force. It may be expected from the result that this system is able to realize a nanoscale positioning system.