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Development of detection method of real contact between solid surfaces by sputtered thin film

溅射薄膜固体表面真实接触检测方法的研制

基本信息

批准号：
15560112
负责人：
KAWAGUCHI Takahisa
金额：
$ 1.41万
依托单位：
Utsunomiya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560112/
关键词：
real contact area solid surface sputtered thin films multi-scale hertzian contact SPM

项目摘要

It is difficult to detect the real contact area with lateral size of less than several μm by existing methods. In this study, a technique is proposed to realize the detection of the micro-contacts. The technique for detecting the contacts is based on the principle using transfers between sputtered thin films coated on both of contact surfaces. In the previous study, to realize the detection of the micro-contacts of less than 1μm in lateral size successfully, sputtered thin films of Au and Pt on a smooth surface are used. Using the procedures, not only the plastic but also elastic contacts may be expected to be seen at the range of several ten nm in lateral size.In this study, in order to clear the effects of the environment humidity, indentation experiments and the real contact area measurements are carried out. A measured mean radius of the circle of Hertz contact tends to become larger than a calculation value of hertzian equation when environment humidity is larger than 70%RH. It seems that this cause is the influence of the meniscus power by a water molecule ofa contact interface. However, it may be expected from the experimental result that this method is able to detect the real contact area by elastic or plastic contact with high accuracy.

现有的方法很难检测横向尺寸小于几μm的真实的接触区域。在这项研究中，提出了一种技术来实现微接触的检测。用于检测接触的技术基于使用涂覆在两个接触表面上的溅射薄膜之间的转移的原理。在前期的研究中，为了成功实现对横向尺寸小于1μm的微接触的检测，我们采用了在光滑表面上溅射Au和Pt薄膜的方法。使用该程序，不仅可以看到横向尺寸在几十纳米范围内的塑性接触，而且可以看到弹性接触。为了明确环境湿度的影响，本文进行了压痕实验和真实的接触面积测量。当环境湿度大于70%RH时，赫兹接触圆的测量平均半径趋于变得大于赫兹方程的计算值。这似乎是由于接触界面的水分子对弯月面功率的影响。然而，从实验结果可以预期，该方法能够以高精度检测弹性或塑性接触的真实的接触面积。

项目成果

期刊论文数量（16）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Friction Characteristics of Needle Roller Thrust Bearings (Part 1)-In the Case of Single Row Type Bearing-

滚针推力轴承的摩擦特性（第1部分）-以单列型轴承为例-

DOI：
发表时间：
2003
期刊：
Journal of Japanese Society of Tribologists 48, 9
影响因子：
0
作者：
中野隆;桃園聡;相沢慎一;吉村英恭;Tetsuzo HATAZAWA
通讯作者：
Tetsuzo HATAZAWA

Measurement of Contacts by SPM

通过 SPM 测量接触点

DOI：
发表时间：
2004
期刊：
Proceedings of Metrology and Properties of Engineering Surfaces 9th International Conference, Sweden
影响因子：
0
作者：
Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro;Hiroyasu Koshimizu;Tetsuzo HATAZAWA;Takahisa Kawaguchi
通讯作者：
Takahisa Kawaguchi

スラスト針状ころ軸受の摩擦特性(第1報)-単列形の場合-

推力滚针轴承的摩擦特性（第1部分）-单列型情况-