Fundamental study on optimization of nanocarbon materials fabrication technique using an atmospheric-pressure plasma-assisted chemical vapor deposition

在本研究项目中，为了检验能否获得体积和径向均匀的大气压等离子体，采用一维流体模型对非热大气压碳氢等离子体进行了数值模拟。通常，低气压下的碳氢等离子体可用于制备类金刚石、金刚石、石墨烯、碳纳米管等纳米碳材料，结果表明，在常压碳氢气体中不能产生适合于等离子体CVD新技术的体积和径向均匀的等离子体，这是因为作为等离子体产生的重要因素，电子倍增在常压碳氢条件下往往会迅速增加。因此，我们需要对这一项目进行进一步的研究，以克服这一问题。

In this research project, numerical simulation of non-thermal atmospheric-pressure hydrocarbon plasmas has been conducted using a one-dimensional fluid model, in order to examine whether volumetric and radially-uniform atmospheric-pressure plasmas can be obtained. Usually, hydrocarbon plasmas at low-pressure can be utilized for the fabrication of nanocarbon materials such as diamond-like carbon, diamond, graphene, carbon nanotube, etc. As a result, it is clarified that the volumetric and radially-uniform plasmas at atmospheric-pressure hydrocarbon gas, which are suitable for novel technique of plasma CVD, can not be produced, since electron multiplication, which is important factor for plasma generation, tends to increase rapidly under atmospheric-pressure hydrocarbon condition. Therefore, we need to further investigation on this project, in order to overcome this problem.