Fundamental study on optimization of nanocarbon materials fabrication technique using an atmospheric-pressure plasma-assisted chemical vapor deposition

本课题采用一维流体模型对非热常压烃等离子体进行了数值模拟，以检验是否可以得到体积和径向均匀的常压等离子体。通常，碳氢等离子体在低压下可用于制造纳米碳材料，如类金刚石碳、金刚石、石墨烯、碳纳米管等。结果表明，在常压碳氢气体条件下，由于等离子体产生的重要因素电子倍增率在常压碳氢气体条件下会迅速增加，因此无法产生适合于等离子体CVD新技术的体积和径向均匀等离子体。因此，为了克服这个问题，我们需要对这个项目进行进一步的调查。

In this research project, numerical simulation of non-thermal atmospheric-pressure hydrocarbon plasmas has been conducted using a one-dimensional fluid model, in order to examine whether volumetric and radially-uniform atmospheric-pressure plasmas can be obtained. Usually, hydrocarbon plasmas at low-pressure can be utilized for the fabrication of nanocarbon materials such as diamond-like carbon, diamond, graphene, carbon nanotube, etc. As a result, it is clarified that the volumetric and radially-uniform plasmas at atmospheric-pressure hydrocarbon gas, which are suitable for novel technique of plasma CVD, can not be produced, since electron multiplication, which is important factor for plasma generation, tends to increase rapidly under atmospheric-pressure hydrocarbon condition. Therefore, we need to further investigation on this project, in order to overcome this problem.